复合绒面ZnO:Al光栅增强薄膜硅电池陷光特性  

Light Trapping Enhancement of Composite Rough Surface ZnO:Al Gratings in Thin Film Silicon Solar Cells

作　　者：刘仁臣 陆静 程和平[2] 梁钊铭 刘洋[1] LIU Ren-chen;LU Jing;CHENG Heping;LIANG Zhao-ming;LIU Yang(Zhuhai College of Jilin Universily,Zhuhai,Guangdong 519041,China;School of Information Engineering,Huangshan College,Huangshan,Anhui 245041,China;Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai,200083,China)

机构地区：[1]吉林大学珠海学院,广东珠海519041 [2]黄山学院信息工程学院,安徽黄山245041 [3]中国科学院上海技术物理研究所,上海200083

出　　处：《光子学报》2020年第9期78-85,共8页Acta Photonica Sinica

基　　金：广东省普通高校重点科研平台和科研项目(No.2018KTSCX306);吉林大学珠海学院创新培育重点项目(No.2018XJCQSQ047),吉林大学珠海学院教学研究项目(Nos.ZLGC20191004,2019JZDJ034)。

摘　　要：探讨复合绒面ZnO:Al光栅对薄膜硅太阳能电池光俘获效率的影响.织构了由关联长度(lcor)和平均高度(have)表征的绒面,叠加到周期为980nm和槽深为160nm的一维正弦ZnO:Al光栅上,形成复合绒面ZnO:Al光栅.前电极AZO光栅,当lcor较小和have较大时,电池的短路电流较高.若lcor取0.01,则短路电流随have的增大而升高,由have=0.05时的21.93 mA/cm2增加到have=0.80时的23.80mA/cm2.置于背电极且lcor=0.01时,短路电流随have的增加而逐渐减小,由have=0.05时的25.50mA/cm2降到have=0.80时的24.81 mA/cm2.采用直流溅射和化学腐蚀方法分别制备了无绒面ZnO:Al光栅和lcor=0.01,have=0.14的复合绒面ZnO:Al光栅.反射率测试结果表明,复合绒面ZnO:Al光栅总反射率(8.3%)较无绒面ZnO:Al栅(10.2%)降低了1.9%,镜面反射率(4.7%)较无绒面ZnO:Al栅(6.8%)降低了2.1%.以实验制备的两种光栅为模型用严格耦合波方法进行模拟,计算结果表明与无绒面ZnO:Al光栅相比,复合绒面ZnO:Al光栅的总反射率和镜面反射率均显著下降.复合绒面ZnO:Al光栅由于具有较好的减反作用更适合用作薄膜电池前电极,从而得到更高的短路电流;而无绒面ZnO:Al光栅因具有较高的反射适用于背电极,能将到达背电极的光子重新返回硅吸收层而获得更高的陷光效率.This paper discussed the influence of composite rough surface aluminum-doped zinc oxide(ZnO:Al)gratings on light trapping efficiency of thin film silicon solar cells.Rough surface was characterized by correlation length(lcor)and average height(have),and superimposed on a one-dimension sine ZnO:Al grating with 980 nm period and 160 nm groove depth.The short-circuit current was higher when front electrode AZO grating had smaller lcorand larger have.As lcor=0.01,short-circuit current raised with the increase of havevalue,from 21.93 mA/cm2 of have=0.05 to 23.80 mA/cm2 of have=0.80.When used as back electrode,the short-circuit current decreased with the increase of have,from25.50 mA/cm2 of have=0.05 to 24.81 mA/cm2 of have=0.80.Composite rough surface ZnO:Al grating and non-rough surface ZnO:Al grating were fabricated by chemical etching and direct current sputter respectively.Reflectivity results showed that total reflection of composite rough surface ZnO:Al grating(8.3%)was 1.9%lower than that of non-rough surface ZnO:Al grating(10.2%),and specular reflection of composite rough surface ZnO:Al grating(4.7%)was 2.1%lower than that of non-rough surface ZnO:Al grating(6.8%).Rigorous coupled wave method was used to simulate reflection of ZnO:Al grating with and non-rough surface.Results further confirmed that composite rough ZnO:Al grating was more suitable for front electrode of thin film solar cells due to its better anti-reflection effect and could obtain a larger short-circuit current.Non-rough surface ZnO:Al grating could reflect more photons back to silicon absorption layer due to its higher reflection and was more suitable for back electrode.

关 键 词：绒面 光栅 薄膜电池 短路电流 反射率 

分 类 号：TK514[动力工程及工程热物理—热能工程]