谐振式传感器高精度频率测量技术研究  

Research on high precision frequency measurement technology of resonant sensor

作　　者：王健 杨挺[1] WANG Jian;YANG Ting(Aerospace Long March Launch Vehicle,Beijing 100076,China)

机构地区：[1]航天长征火箭技术有限公司传感器与系统集成事业部,北京100076

出　　处：《遥测遥控》2020年第3期37-41,共5页Journal of Telemetry,Tracking and Command

基　　金：装备预先研究项目(41403060107)。

摘　　要：随着MEMS振梁加表、振梁压力传感器等谐振式传感器精度的提高,对频率测量精度的要求也随之提高。现有的测频技术通常采用单片机内置的输入捕获及中断功能,与实际需求的测量精度差距较大。提出一种基于FPGA的高精度频率测量方案,在5ms的采样间隔下实现1ppm的相对频率测量精度,满足高精度谐振式传感器的精度要求。With the improvement of the accuracy of the resonant sensors such as MEMS vibration beam accelerometer and vibration beam pressure sensor,the requirement of the frequency measurement accuracy is also improved.The existing frequency measurement technology usually uses the function of input capture and interrupt built in the MCU,which can not guarantee the timing constraints,and have a large gap with actual demand of measurement accuracy.In this paper,a high-precision frequency measurement scheme based on FPGA is proposed.The scheme achieves the relative frequency measurement accuracy of 1ppm under the sampling interval of 5ms,which meets the accuracy requirements of high-precision resonant sensor.

关 键 词：谐振式传感器 高精度频率测量 FPGA 

分 类 号：V241.4[航空宇航科学与技术—飞行器设计]