一种新型电磁真空泵的优化设计  

Optimization Design of a New-Style Electromagnetic Vacuum Pump

作　　者：柯燕峰 常思勤[1] 谭草 KE Yan-feng;CHANG Si-qin;TAN Cao(School of Mechanical Engineering Nanjing University of Science and Technology,Jiangsu Nanjing 210094,China)

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《机械设计与制造》2020年第9期267-270,275,共5页Machinery Design & Manufacture

基　　金：上海航天科技创新基金资助项目(SAST2015095)。

摘　　要：针对传统膜片式真空泵质量大、成本高的缺点,提出了一种由电磁执行器直驱的两级串联膜片式真空泵,并验证了其具有良好的抽气性能。利用Matlab/Simulink建立了电磁真空泵的仿真模型,结合仿真模型分析及样机性能测试,确定模型参数,验证了模型准确性;结合插值法与有限元法建立了簧片阀刚度和结构参数之间的关系式,并根据簧片阀结构建立了等效质量和结构参数之间的关系式;在此基础上,以真空度最大为目标,利用遗传算法进行簧片阀组的协同优化。结果表明:电磁真空泵样机优化后抽气性能提升了37%,优化后的抽气性能良好,30s内真空度可达66.9kPa,为后续电磁真空泵的研究提供了参考。Aiming at the disadvantages of high quality and high cost of traditional diaphragm vacuum pump,a type of two-stage tandem diaphragm vacuum pump with a linear drive of electromagnetic actuator is proposed,and it has been proved that it has good extraction performance.The simulation model of electromagnetic vacuum pump was established by Matlab/Simulink,and the model parameters were determined by the simulation model analysis and prototype performance test,and the accuracy of the model was verified.Combined with the interpolation method and finite element method,the relation between the reed valve rigidity and its structural parameters was established,and according to the reed valve structure,the relation between the equivalent mass and its structure parameters was established.On this basis,aiming for the maximum vacuum degree,the genetic algorithm was used to optimize the reed valve group.The results showed that after optimization,the extraction performance of the electromagnetic vacuum pump is 37%higher than that before optimization.After optimization,its extraction performance is good,the vacuum degree can reach 66.9kPa in 30 seconds,which also provides reference for the follow-up study of electromagnetic vacuum pump.

关 键 词：电磁真空泵 簧片阀 抽气模型 仿真分析 优化设计 

分 类 号：TH16[机械工程—机械制造及自动化] TH36