偏振和相位调控反射镜的设计与制备  

Design and Fabrication of Polarization- and Phase-Modulated Mirror

作　　者：余德明 段微波[2] 李大琪[2] 刘保剑[2] 陈刚 洪瑞金[1] Deming Yu;Weibo Duan;Daqi Li;Baojian Liu;Gang Chen;Ruijin Hong(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]中国科学院上海技术物理研究所,上海200083

出　　处：《光学学报》2020年第15期216-220,共5页Acta Optica Sinica

基　　金：国家自然科学基金(61605229)。

摘　　要：运用等效层理论,设计了一种目标波长分别为780,810,850 nm,在45°入射角下使用的反射镜,该反射镜在保证膜层高反射率的同时实现了对偏振和相位的调控。为了在较宽波段上满足平均反射率高的要求,选用金属银和Ta2O5、SiO2作为光学薄膜的材料。采用电子束蒸发和热蒸发方式并配合石英晶体振荡监控膜厚等工艺,在JGS-1石英基底上获得了500~1600 nm波段范围内平均反射率大于95%,目标波长下消光比分别优于3000∶1、5000∶1和7000∶1的反射镜膜系。所设计的反射镜可以满足空间环境下量子通信应用的可靠性要求。In this study,the equivalent film theory is used to develop a polarization-and phase-modulated mirror with target wavelengths of 780,810,and 850 nm and an incidence angle of 45°.Apart from achieving polarization and phase modulation,the obtained mirror can ensure the high reflectivity of the thin films.A metallic material(Ag)and two dielectric thin film materials(such as Ta2O5 and SiO2)are selected as the film materials to obtain high reflectance over a wide waveband.The mirror film system is fabricated on an optical glass substrate(JGS-1)using the electron beam evaporation,thermal evaporation,and quartz crystal oscillation monitoring technologies.The measured spectra of the mirror film system denote that the average reflectance is greater than 95%in the wavelength range of 500--1600 nm and the extinction ratios at the target wavelengths exceed 3000∶1,5000∶1,and 7000∶1.Thus,the proposed mirror satisfies the reliability requirement associated with space-to-ground quantum communication.

关 键 词：薄膜 反射镜 偏振 相位 

分 类 号：O484[理学—固体物理]