Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching  

作　　者：Jun-xia Zhou Ren-hong Gao Jintian Lin Min Wang Wei Chu Wen-bo Li Di-feng Yin Li Deng Zhi-wei Fang Jian-hao Zhang Rong-bo Wu and Ya Cheng 周俊霞;高仁宏;林锦添;汪旻;储蔚;李文博;尹狄峰;邓莉;方致伟;张健皓;伍荣波;程亚(State Key Laboratory of Precision Spectroscopy,East China Normal University,Shanghai 200062,China;XXL-The Extreme Optoelectromechanics Laboratory,School of Physics and Electronics Science,East China Normal University,Shanghai 200241,China;State Key Laboratory of High Field Laser Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China;Collaborate CAS Center for Excellence in Ultra-intense Laser Science,Shanghai 201800,China;Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China;Shanghai Research Center for Quantum Sciences,Shanghai 201315,China)

机构地区：[1]State Key Laboratory of Precision Spectroscopy,East China Normal University,Shanghai 200062,China [2]XXL-The Extreme Optoelectromechanics Laboratory,School of Physics and Electronics Science,East China Normal University,Shanghai 200241,China [3]State Key Laboratory of High Field Laser Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China [4]University of Chinese Academy of Sciences,Beijing 100049,China [5]Collaborate CAS Center for Excellence in Ultra-intense Laser Science,Shanghai 201800,China [6]Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China [7]Shanghai Research Center for Quantum Sciences,Shanghai 201315,China

出　　处：《Chinese Physics Letters》2020年第8期43-47,共5页中国物理快报（英文版）

基　　金：Supported by the National Key R&D Program of China(Grant No.2019YFA0705000);the National Natural Science Foundation of China(Grant Nos.11734009,61590934,and 11874375);the Strategic Priority Research Program of CAS(Grant No.XDB16030300);the Key Project of the Shanghai Science and Technology Committee(Grant No.17JC1400400).

摘　　要：Optical true delay lines(OTDLs)of low propagation losses,small footprints and high tuning speeds and efficiencies are of critical importance for various photonic applications.Here,we report fabrication of electro-optically switchable OTDLs on lithium niobate on insulator using photolithography assisted chemo-mechanical etching.Our device consists of several low-loss optical waveguides of different lengths which are consecutively connected by electro-optical switches to generate different amounts of time delay.The fabricated OTLDs show an ultra-low propagation loss of^0.03dB/cm for waveguide lengths well above 100 cm.

关 键 词：lithography waveguide tuning 

分 类 号：TN491[电子电信—微电子学与固体电子学]