表面微纳结构对光的透射性能影响分析  

Analysis of effect of surface micro-nano structure on transmission performance of light

作　　者：向华 武亮亮[2] 赵登峰[1] 马国鹭[1] 曾国英[1] XIANG Hua;WU Liangliang;ZHAO Dengfeng;MA Guolu;ZENG Guoying(Ministry of Education Key Laboratory of Testing Technology for Manufacturing Process,Southwest University of Science and Technology,Mianyang 621010,China;China Aerodynamics Research and Deve lopment Center,Mianyang 621010,China)

机构地区：[1]西南科技大学制造过程测试技术教育部重点实验室,四川绵阳621010 [2]中国空气动力研究与发展中心,四川绵阳621010

出　　处：《光学技术》2020年第4期404-409,共6页Optical Technique

基　　金：国家自然科学基金(61505169);西南科技大学研究生创新基金(19ycx0126)。

摘　　要：针对传统光学元件增透的方法中存在物理、化学性质的限制而导致热失配、稳定性不足等问题,提出了对光学表面直接加工圆球和圆锥形两种微纳结构的增透方式;构建了两种微结构模型并以0.38~0.9μm的入射光在不同入射角的条件下对二者进行数值仿真;分析了两种模型随波长与入射角变化的反射率、透射率和电场的变化情况,并对两种实验元件进行实验测试;结合两种微纳结构的仿真和实验数据结果进行对比,获得了两种微纳结构对光透射性能的影响情况。结果表明:入射光波长由小增大时,光学元件透射率增大,并随着波长继续增大透射率逐渐趋于稳定。可为表面微纳结构对光透射性能的影响研究,以及对微纳光学器件的优化设计、制造提供参考。In traditional anti-reflection methods of optical elements,there are problems such as heat mismatches and unstability that caused by the limitation of physical and chemical properties.In order to solve these problems,a new anti-reflection method which fabricates the spherical and conical micro-nano structures directly on the optical surface is proposed.Two kinds of microstructural models are constructed and simulated with the incident wave of 0.38~0.9μm at different elevation angles.The changes of reflectance,transmittance and electric field of the two models with the change of wavelength and elevation angle are analyzed.The effects of two micro-nano structures on the transmission performance are obtained by comparing the results of simulation and experimental data.The results show that the transmittance of optical element increases when the wavelength of incident light increases,and the transmittance tends to be stable as the wavelength continues to increase.It can provide a reference for the study of the influence of the surface micro-nano structure on the optical transmission performance,as well as for the optimal design and manufacturing of micro-nano optical devices.

关 键 词：表面微纳结构 微纳光学 反射性能 亚波长结构 

分 类 号：TN256[电子电信—物理电子学]