一款S波段双通道FBAR滤波器  

S-Band Dual-Channel FBAR Filter

作　　者：王胜福[1] 李丽[1] Wang Shengfu;Li Li(The 13th Research Institute,CETC,Shijiazhuang 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《半导体技术》2020年第9期675-679,共5页Semiconductor Technology

摘　　要：研制了一款S波段双通道薄膜体声波谐振器(FBAR)滤波器,其两个通带频率分别为(2000±45)MHz和(2800±45)MHz,在两个通道的输入、输出端分别加入匹配电路。FBAR滤波器芯片采用阶梯型电路结构设计,采用声电磁协同仿真方法对各个通道的FBAR滤波器分别进行了仿真设计。匹配电路采用由低通滤波器和高通滤波器构成的双工器方案实现。对印制电路板、FBAR滤波器芯片和匹配电路进行了一体化仿真。FBAR滤波器芯片采用自主的FBAR标准工艺实现,双通道FBAR滤波器采用微波混合集成电路工艺实现,其体积为12.2 mm×12.2 mm×4.8 mm。滤波器采用陶瓷外壳进行了气密封装,具有免调试、参数一致性好的特点,拓宽了FBAR滤波器的应用范围。A dual-channel film bulk acoustic resonator(FBAR)filter for S-band application was developed.The two passband frequencies are(2000±45)MHz and(2800±45)MHz,respectively.Matching circuits were added separately at the input/output ports of the two channels.The ladder circuit structure was adopted to design the FBAR filter chip.The combined acoustic-electromagnatic simulaiton method was used to simulate and design the FBAR filters in each channel separately.The matching circuits were realized by the diplexers composed of lowpass and highpass filters.The printed circuit board layout,FBAR filter chips and matching circuits were integrally simulated.The FBAR filter chip was realized by the self-developed FBAR standard process.The dual-channel FBAR filter with the volume of 12.2 mm×12.2 mm×4.8 mm was implemented by microwave hybird integrated circuit process.The filter was hermetically sealed by a ceramic package.It has the advantages of adjust-free and good performance consistency,and has extended the application scope of FBAR filters.

关 键 词：双通道 薄膜体声波谐振器(FBAR)滤波器芯片 S波段 匹配电路 插入损耗 带外抑制 

分 类 号：TN454[电子电信—微电子学与固体电子学] TN713