Polymer-derived SiBCN ceramic pressure sensor with excellent sensing performance  

作　　者：Gang SHAO Junpeng JIANG Mingjie JIANG Jie SU Wen LIU Hailong WANG Hongliang XU Hongxia LU Rui ZHANG 

机构地区：[1]School of Materials Science and Engineering,Zhengzhou University,Zhengzhou 450001,China [2]Provincial Key Laboratory of Aviation Materials and Application Technology,Zhengzhou University of Aeronautics,Zhengzhou 450046,China

出　　处：《Journal of Advanced Ceramics》2020年第3期374-379,共6页先进陶瓷（英文）

基　　金：The authors appreciate the financial support from the National Natural Science Foundation of China(No.U1904180);Key Scientific Research Projects of High Education Institutions of Henan province(No.19A430025).

摘　　要：Pressure measurement with excellent stability and long time durability is highly desired,especially at high temperature and harsh environments.A polymer-derived silicoboron carbonitride(SiBCN)ceramic pressure sensor with excellent stability,accuracy,and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics.The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa.The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor(K)as high as 5500.The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure.The as received SiBCN pressure sensor possesses features of short response time,excellent repeatability,stability,sensitivity,and accuracy.Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics(e.g.,high temperature stability,oxidation/corrosion resistance)into account,SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.

关 键 词：polymer-derived ceramics(PDCs) silicoboron carbonitride(SiBCN)ceramic pressure sensor piezoresistivity high termperature and harsh environment sensor 

分 类 号：TQ174.1[化学工程—陶瓷工业] TP212[化学工程—硅酸盐工业]