偏压对电弧离子镀CrAlN涂层微观结构及耐侵蚀性能的影响  

Effect of Bias Voltage on Microstructure and Erosion Resistance of CrAlN Coatings Deposited by Arc Ion Plating

作　　者：王迪[1,2] 林松盛 刘灵云 薛玉娜 杨洪志 蒋百灵 周克崧[1,2] Wang Di;Lin Songsheng;Liu Lingyun;Xue Yuna;Yang Hongzhi;Jiang Bai-ling;Zhou Kesong(Xi’an University of Technology,Xi’an 710048,China;The Key Lab of Guangdong for Modern Surface Engineering Technology,National Engineering Laboratory For Modern Materials Surface Engineering Technology,Guangdong Institute of New Materials,Guangzhou 510651,China)

机构地区：[1]西安理工大学,陕西西安710048 [2]广东省新材料研究所现代材料表面工程技术国家工程实验室广东省现代表面工程技术重点实验室,广东广州510651

出　　处：《稀有金属材料与工程》2020年第8期2583-2590,共8页Rare Metal Materials and Engineering

基　　金：Guangdong Science and Technology Program(2017A070701027,2014B070705007);GDAS’Project of Science Technology Development(2019GDASYL-0302012,2017GDASCX-0111)。

摘　　要：通过在TC11钛合金上利用电弧离子镀技术制备了铬铝氮(CrAlN)涂层。采用X射线衍射(XRD),扫描电子显微镜(SEM),能量色散X射线光谱(EDS),纳米压痕仪等对CrAlN涂层微观结构和力学性能(如硬度和弹性模量)进行了分析。为了研究偏压对CrAlN涂层固体颗粒耐侵蚀性的影响,还进行了一系列固体颗粒侵蚀实验。结果发现,随着偏压从0 V增加至200 V,CrA1N涂层的择优生长取向逐渐从(200)转变为(111)晶面。硬度从15.1 GPa增加至接近20 GPa。同时,表面逐渐平整,大颗粒和针孔的数量减少,对CrAlN涂层的耐侵蚀性能均有一定影响。偏压150 V时,CrAlN涂层获得最小侵蚀速率,其在30°时为0.032μm/g,90°时为1.869μm/g。这些结果表明,选择适当的偏压,CrAlN涂层能够获得更优异的固体颗粒耐侵蚀性。CrAlN coatings were prepared on TC11 titanium alloy by arc ion plating.The effects of negative bias voltage on the microstructure and mechanical properties,such as hardness and elastic modulus,of the coatings were investigated by X-ray diffraction(XRD),scanning electron microscope(SEM),energy dispersive X-ray spectroscopy(EDS)and nano-indentation.A series of solid particle erosion experiments were also conducted to study the influence of bias voltages on the solid particle erosion resistance of CrAlN coatings.Results show that the preferred growth orientation of CrA1N coatings gradually varies from(200)to(111)crystal plane with changing the bias voltage from 0 V to 200 V.The hardness increases from 15.1 GPa to nearly 20 GPa.At the same time,the number of macro-particles and pinholes decreases as the surface gradually flattens,which improves the erosion resistance of the CrAlN coating.The CrAlN coating deposited at the bias voltage of 150 V obtains the minimum erosion rates,which are 0.032μm/g at 30°and 1.869μm/g at 90°.These results indicate that the CrAlN coating formed at an appropriate bias voltage can achieve excellent solid particle erosion resistance.

关 键 词：CrAlN涂层 负偏压 微观结构 固体颗粒侵蚀 

分 类 号：TG174.4[金属学及工艺—金属表面处理]