用于AlGaN基DUV LED封装的高反射镀铝DPC陶瓷基板  

High-reflection Al-plated DPC ceramic substrate for AlGaN-based DUV LED packaging

作　　者：杨宇铭 李燕 郑怀文[1] 于飞[1] 杨华[1,2] 伊晓燕 王军喜[1,2] 李晋闽 YANG Yu-ming;LI Yan;ZHENG Huai-wen;YU Fei;YANG Hua;YI Xiao-yan;WANG Jun-xi(Research and Development Center for Semiconductor Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;College of Materials Science and Optoelectronics Technology, University of Chinese Academy of Sciences, Beijing 100049, China)

机构地区：[1]中国科学院半导体研究所半导体照明研发中心,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《液晶与显示》2020年第10期991-999,共9页Chinese Journal of Liquid Crystals and Displays

基　　金：国家重点研发计划(No.2017YFB0403801)。

摘　　要：传统的直接镀铜(DPC)陶瓷基板的焊盘上镀有Ni/Au金属覆盖层,它会强烈吸收紫外(UV)光。为了提高深紫外发光二极管(DUV LED)的光提取效率(LEE),设计并制备了镀Al的双层金属镀层DPC陶瓷基板。这种基板拥有一层完全覆盖基板焊盘的Ni/Au镀层为LED提供电互连,以及一层部分覆盖Ni/Au镀层的高反射Al镀层为UV光提供优异的反射。测量了分别由镀Al的DPC陶瓷基板和仅有一层Ni/Au镀层的传统DPC陶瓷基板所封装的DUV LED的光学、电学和热学性质,并建立了LED封装体的模型并进行了分析。结果表明,通过使用镀Al的DPC陶瓷基板,DUV LED的光输出功率(LOP)提高了19.2%,功率效率(WPE)和外量子效率(EQE)则分别提高为传统封装的1.20和1.19倍。此外,经过160 h的老化测试,使用镀Al的DPC陶瓷基板封装的LED表现出了更好的可靠性。这种镀Al的双层金属镀层DPC陶瓷基板为通过封装改善DUV LED的LEE提供了可行的方法。Ni/Au coating films plated on traditional direct plated copper(DPC)ceramic substrates will strongly absorb ultraviolet(UV)light.To enhance light extraction efficiency(LEE)of deep ultraviolet light emitting diodes(DUV LEDs),a DPC ceramic substrate plated with two metal coating films was designed and prepared.A Ni/Au film covering the pad of the DPC ceramic substrate can provide electrical interconnection for LEDs,and a high-reflection Al film partly covering the Ni/Au film can provide superior reflection for UV light.Optical,electrical and thermal properties of the DUV LED packaged by the Al-plated DPC ceramic substrate and traditional DPC ceramic substrate with only one Ni/Au coating film were measured,and models of the packaged LED were established and analyzed.As a result,by using the Al-plated DPC ceramic substrate,the light output power(LOP)of the DUV LED is enhanced by 19.2%,while the wall plug efficiency(WPE)and the external quantum efficiency(EQE)are enhanced by 1.20 and 1.19 times,respectively.Furthermore,after aging tests for 160 h,LEDs packaged by Al-plated DPC ceramic substrates showed better reliability.This Al-plated DPC ceramic substrate provides a feasible way to improve the LEE of DUV LEDs by packaging.

关 键 词：DUV LED封装 DPC陶瓷基板 光学特性 热阻 

分 类 号：TN312.8[电子电信—物理电子学]