气体传感器用Au掺杂WO3基复合涂层的组织及气敏性研究  

Study on microstructure and gas sensitivity of Au-doped WO3-based composite coating used in gas sensor

作　　者：左明鑫[1] 李月英[1] ZUO Ming-xin;LI Yue-ying(School of Electrical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China)

机构地区：[1]郑州科技学院电气工程学院,郑州450064

出　　处：《粉末冶金技术》2020年第4期283-288,共6页Powder Metallurgy Technology

基　　金：河南省科技攻关项目(182102110306);河南省产学研合作科技攻关项目(162107000011);河南省高等学校重点科研项目(16A470015)。

摘　　要：为了提高气体传感器的测试精度,选择等离子喷涂工艺来制备Au掺杂WO3基(WO3/Au)复合涂层,并对复合涂层的组织和气敏性展开分析。结果表明:在WO3/Au复合涂层的X射线衍射谱图上,只观察到WO3与Au对应的两种衍射峰,没有出现其他物相的衍射峰;相对于纯WO3涂层,WO3/Au复合涂层没有发生颗粒尺寸、结晶度与微观结构的显著改变;WO3/Au复合涂层的吸脱附曲线发生了分离的现象,出现了脱附滞后的情况。当温度上升,气体传感器用纯WO3涂层和WO3/Au复合涂层都出现了响应值先升高到峰值又逐渐降低的现象,其中最大值出现在300℃处;不同于纯WO3涂层,气体传感器用WO3/Au复合涂层可以实现对NO2的快速响应,并获得更短的恢复时间,说明WO3/Au复合涂层具备更优的气敏性。To improve the accuracy of gas sensor,the Au-doped WO3-based(WO3/Au)composite coatings were prepared by the plasma spraying process,and the microstructure and gas sensitivity were analyzed.The results show that,only two diffraction peaks,corresponding to Au and WO3,are formed in the X-ray diffraction patterns of the WO3/Au composite coatings,and no other phase diffraction peaks are generated.Compared with the pure WO3 coatings,the WO3/Au composite coatings do not significantly change in the particle size,crystallinity,and microstructure.The separation phenomenon occurs in the desorption curve of the WO3/Au coatings,which results in the desorption lag.When the temperature rises,the response values of the pure WO3 coatings and the WO3/Au composite coatings used in gas sensors rise to the peak and then gradually decrease,and the maximum value appears at 300℃.Compared with the pure WO3 coatings,the WO3/Au composite coatings used in gas sensors can achieve the rapid response to NO2 and obtain the shorter recovery time,showing the better gas sensitivity of WO3/Au composite coatings.

关 键 词：等离子体喷涂 WO3涂层 掺杂 显微组织 气敏性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]