离子注渗工艺参数对9310钢表面WC–DLC薄膜性能影响  

Effects of Nitrogen Ion Implantation Parameters on Adhesion of WC–DLC Coatings to 9310 Steel

作　　者：罗阳 冉彪 唐梦兰 杨昭 谢焕钧 刘辉 李刘合[1] LUO Yang;RAN Biao;TANG Menglan;YANG Zhao;XIE Huanjun;LIU Hui;LI Liuhe(School of Mechanical Engineering and Automation,Beihang University,Beijing 100191,China;AECC Zhongchuan Transmission Machinery Co.,Ltd.,Changsha 410200,China;Aviation Military Representative Office of the Army Armament Department Aviation Military Representative Bureau in Zhuzhou,Zhuzhou 412000,China;AECC Hunan Aviation Powerplant Research Institute,Zhuzhou 412002,China)

机构地区：[1]北京航空航天大学机械工程及自动化学院,北京100191 [2]中国航发中传机械有限公司,长沙410200 [3]陆军装备部航空军事代表局驻株洲地区航空军代室,株洲412000 [4]中国航发湖南动力机械研究所,株洲412002

出　　处：《航空制造技术》2020年第17期40-46,共7页Aeronautical Manufacturing Technology

基　　金：国家重大科技专项(2017–VII–0003–0096);国防基础科研项目(JCKY2018601C205);武器装备预研基金(61409230602)。

摘　　要：为提高9310钢表面WC–DLC薄膜结合力与摩擦磨损性能,分别探究了不同注渗时间和注渗电压工艺参数对9310钢表面硬度、WC–DLC涂层结合力以及摩擦性能的影响。研究结果显示:当注渗电压从10kV升高到20kV时,9310钢表面硬度从7.34GPa增加到8.36GPa,膜基结合力从39.9N增加到49.3N,薄膜表面摩擦系数从0.161下降到0.119,薄膜摩擦学测试磨损深度从2.39μm下降到2.03μm;注入时间从1h增加到3h时,9310钢表面硬度从7.06GPa增加到8.84GPa,膜基结合力从34.1N增加到49.9N,薄膜表面摩擦系数从0.161下降到0.118,薄膜摩擦学测试磨痕深度从2.48μm下降到1.99μm。研究表明,9310钢表面离子注渗对WC–DLC涂层结合力与力学性能有一定的改善,结合力增加,摩擦学性能优化。When the WC–DLC films were applied to the surface of 9310 steel by physical vapor deposition(PVD)technology,the film was prone to split off due to the internal stress of the DLC coatings and the mechanical property differences between the steel matrix and the film.Ion implantation pretreatment on the gear steel surface is one of the methods to enhance coating adhesion to the substrate.In this paper,the effects of different nitrogen ion implantation time and implantation voltage on the substrate surface hardness,coating adhesion and tribological properties were investigated.It was found that the implantation voltage increased from 10kV to 20kV,the hardness of the 9310 steel surface increased from 7.34GPa to 8.36GPa,the adhesion of the coatings to substrate increased from 39.9N to 49.3N,the surface friction coefficient of the film decreased from 0.161 to 0.119,and the wear depth of the tribology test decreased from 2.39 to 2.03,respectively.When the implantation time increased from 1h to 3h,the hardness of the 9310 steel surface increased from 7.06GPa to 8.84GPa,the adhesion increased from 34.1N to 49.9N,the surface friction coefficient of the film decreased from 0.161 to 0.118,and the friction depth of the film tribology test decreased from 2.48 to 1.99,respectively.

关 键 词：9310钢 类金刚石薄膜(DLC) 离子注渗工艺 膜基结合力 摩擦磨损性能 

分 类 号：TG174.4[金属学及工艺—金属表面处理]