阴阳离子共掺杂ZnO透明导电薄膜的研究进展  

ZnO transparent conducting thin films codoped with anions and cations

作　　者：马剑钢 林东 李鹏 杨国春 刘益春 Jiangang Ma;Dong Lin;Peng Li;Guochun Yang;Yichun Liu(Key Laboratory of Ultraviolet Emission Materials and Technology of Ministry of Education,School of Physics,Northeast Normal University,Changchun 130024,China)

机构地区：[1]东北师范大学物理学院,紫外光发射材料与技术教育部重点实验室,长春130024

出　　处：《科学通报》2020年第25期2678-2690,共13页Chinese Science Bulletin

基　　金：国家重点基础研究发展计划(2012CB933703);国家自然科学基金重大研究计划(91233204)资助。

摘　　要：ZnO基透明导电薄膜具有成本低、环境友好、抗辐射能力强、对H等离子体耐受性好等优点,是金属氧化物半导体研究领域的一个极为重要的方向.目前,无论阳离子还是阴离子单独掺杂的ZnO透明导电薄膜在电导率、可见光透过率和热稳定性等方面依然不能完全满足光电器件的要求,为此人们开展了阴阳离子共掺杂ZnO薄膜光电性质的研究工作,取得了良好的效果.本文从理论和实验研究两方面,总结了阴阳离子共掺杂ZnO透明导电薄膜的最新研究成果,系统阐述了阴阳离子对ZnO薄膜的光学、电学和热稳定性的影响规律,分析了阴阳离子共掺杂ZnO研究所面临的问题和挑战,为相关领域的研究和发展提供借鉴和参考.In the past two decades,ZnO related materials and devices are widely used for various applications,such as thin-film transistors,photodetectors,light-emitting diodes,and transparent conductors because ZnO has several appealing features like abundant raw materials,environmental friendliness,wide and direct band gap,high electron mobility,and large exciton bonding energy.Especially,ZnO has been recognized as one of the most promising candidates for substituting commercial transparent conductors ITO which is exploited as transparent electrodes in solar cells and flat planar display and transparent heaters etc.For example,aluminum doped ZnO(AZO)transparent conducting films have been commercialized successfully.However,the figure of merits and stability of ZnO transparent conducting films still need to be further improved in order to meet the strict demands of practical large-scale applications.So far,various techniques have been developed to alleviate that contradiction between conductivity and visible light transmittance.In the past few years,a new strategy called anion and cation co-doping in ZnO has been widely implemented to improve the figure of merit,in which IIIA group elements are used as cation dopants and fluorine is used as anion dopants.It is worth noting that F has several advantages as anion dopant in ZnO.First,fluorine has a similar ionic radius with oxygen,which will avoid large lattice distortion.Second,the substitution for oxygen with fluorine only disturbs the valence band of ZnO and leaves the conduction band unaffected,which is beneficial for achieving high electron mobility.In this review,the latest researches of F and boron,or aluminum,or gallium,or indium co-doped ZnO thin films are summarized from both the theoretical and the experimental aspects.Effects of anion and cation co-doping on the optical and electrical properties and thermal stability of ZnO thin films are systematically discussed.Both theoretical and experimental results show that cation and anion co-doping can effectively improve

关 键 词：透明导电薄膜 氧化锌 阴阳离子共掺杂 缺陷 热稳定性 

分 类 号：TB383.2[一般工业技术—材料科学与工程]