单交变光场余弦透光面集成化时栅传感器研究  

Study on Integrated Time-Grating Sensor of Cosine Grating Surfaces with Single Alternating Light Field

作　　者：付敏 李昌利[1,2] 朱革 蒲治伟 余小雨[1,2] 张双亚 FU Min;LI Chang-li;ZHU Ge;PU Zhi-wei;YU Xiao-yu;ZHANG Shuang-ya(College of Mechanical Engineering,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Engineering Research Center of Mechanical Testing Technology and Equipment of the Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械工程学院,重庆400054 [2]重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《仪表技术与传感器》2020年第8期1-6,12,共7页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目(51875070);国家重大科研仪器研制项目(51827805);重庆市教委科学技术研究项目(KJQN201801105);重庆理工大学研究生创新项目(ycx20192022,ycx20192032)。

摘　　要：针对现有多光场时栅传感器体积大难以集成、光源一致性难控制以及安装误差影响大等问题,提出一种单光场余弦透光面的时栅位移测量方法。该方法采用单交变光场、连续余弦透光面合成电行波信号,从而实现高精度直线位移测量。文中介绍了多光场时栅缺点、单光场时栅的测量原理和集成化设计,并通过仿真和实验验证了连续余弦透光面优化的有效性。完成了光电传感和接收的集成化样机研制和实验平台的搭建。实验结果表明:在100 mm量程内用0.6 mm栅距实现了±0.2μm测量精度。In view of these shortcomings of the four-channel light field time-grating sensor,such as the integrated difficulty,the poor consistency of light sources and the big installation error,an integrated time-grating sensor of cosine grating surfaces with single light field was proposed.In this method,the single alternating light field and continuous cosine grating surfaces were used to synthesize the electrical traveling wave signals,it realized high precision linear displacement measurement.In this paper,these shortcomings of the four-channel light field time-grating,the measuring principle and integrated design of the single light field time-grating were introduced.Then,the effectiveness of continuous cosine transmittance was verified by simulation and experiments.The prototype was manufactured and the experimental platform was built.Experimental results indicate that the measuring accuracy is better than±0.2μm using grating pitch of 0.6 mm in the range of 100 mm.

关 键 词：光学测量 位移传感器 交变光场 余弦透光面 时栅 集成化 

分 类 号：TH711[机械工程—测试计量技术及仪器] TH741[机械工程—仪器科学与技术]