高低温环境光栅线位移传感器校准装置精度设计  

Accuracy Design of Grating Displacement Sensor Calibration Device for High and Low Temperature Environment

作　　者：何涛 朱跃 杨天豪 胡佳成 乔凤斌 He Tao;Zhu Yue;Yang Tian-hao;Hu Jia-cheng;Qiao Feng-bin(College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,310018;Shanghai Aerospace Equipments Manufacture,Shanghai,200245)

机构地区：[1]中国计量大学计量测试工程学院,杭州310018 [2]上海航天设备制造总厂有限公司,上海200245

出　　处：《导弹与航天运载技术》2020年第5期99-102,共4页Missiles and Space Vehicles

基　　金：国家重点研发计划资助(2017YFF0108000)。

摘　　要：介绍了一种高低温环境光栅线位移传感器校准装置,该校准装置通过机械传动的方式将高低温环境下的位移量传递至常温环境中来实现校准功能。误差计算结果表明,该校准装置的最大允许误差为1.4μm,满足高低温环境光栅线位移传感器的校准精度要求。A kind of grating line displacement sensor calibration device for high and low temperature environment is introduced,which can transfer the displacement in the high and low temperature environment to the ambient temperature environment by mechanical transmission to realize the calibration function.The error calculation results show that the maximum permissible error is 1.4μm,which meets the calibration accuracy requirements of grating linear displacement sensor in high and low temperature environment.

关 键 词：高低温环境 光栅线位移传感器校准 阿贝误差 精度设计 

分 类 号：V556[航空宇航科学与技术—人机与环境工程]