基于电涡流传感器的微位移测量系统的设计  

Design of Micro-displacement Measurement System Based on Eddy Current Sensor

作　　者：荣锋[1,2] 韩信 郭翠娟[1,2] RONG Feng;HAN Xin;GUO Cui-juan(School of Electronics and Information Engineering,Tianjin Polytechnic University,Tianjin 300387,China;Tianjin Key Laboratory of Optoelectronic Detection Technology and System,Tianjin 300387,China)

机构地区：[1]天津工业大学电子与信息工程学院,天津300387 [2]天津市光电检测技术与系统重点实验室,天津300387

出　　处：《仪表技术与传感器》2020年第9期12-18,共7页Instrument Technique and Sensor

基　　金：天津市科委青年基金项目(15JCQNJC42100);天津市科技特派员项目(16JCTPJC48100,16JCTPJC47200)。

摘　　要：针对金属物体微位移测量困难的问题,设计了一种基于电涡流原理的位移测量系统。文中使用一种新型桥式结构设计了系统的硬件电路,完成金属物体的位移量到电压量的转换;使用软件拟合的方法对传感器信号进行非线性补偿和温度补偿,提高传感器的测量精度以及稳定性。测试结果表明,在0~2 mm量程范围内电涡流传感器位移测量系统的线性度小于0.75%,最小仅有0.25%,满足金属物体微位移测量的要求。Aiming at the difficulty of measuring micro-displacement of metal objects,a displacement measurement system based on eddy current principle was designed.In this paper,a new type of bridge structure was used to design the hardware circuit of the system to complete the conversion of the displacement of the metal object to the voltage.The software fitting method was used to nonlinearly compensate and temperature compensate the sensor signal to improve the measurement accuracy and stability of the sensor stability.The test results show that the linearity of the eddy current sensor displacement measurement system is less than 0.75%and the minimum is only 0.25%in the range of 0~2 mm,which meets the requirements of micro-displacement meas-urement of metal objects.

关 键 词：位移传感器 测量系统 系统补偿 非线性误差 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]