微型磁器件纳米孔薄膜铁芯的制备与分析  

Preparation and Analysis of Nanoporous Film Core for Micro Magnetic Devices

作　　者：吕辉[1] 李根 LYU Hui;LI Gen(Electrical Engineering and Automation Institute,Henan Polytechnic University,Jiaozuo 454000,China;Information Engineering Institute,Henan College of Industry Information Technology,Jiaozuo 454000,China)

机构地区：[1]河南理工大学电气工程与自动化学院,河南焦作454000 [2]河南工业和信息化职业学院信息工程系,河南焦作454000

出　　处：《仪表技术与传感器》2020年第9期19-22,50,共5页Instrument Technique and Sensor

基　　金：河南省自然科学基金资助项目(162300410123);河南理工大学博士基金资助项目(B2017-22)。

摘　　要：对薄膜铁芯微观结构的研究与改进有利于提高微型磁器件的综合性能,文中使用标准MEMS工艺制备了具有纳米孔结构的薄膜铁芯,对不同孔径的纳米孔薄膜铁芯进行了相关的表征与测试,分析了孔径大小对薄膜软磁性能的影响。实验分析的结论为确定制备方案和提高性能指标提供了支持。The research and improvement of thin film iron core microstructure is conducive to improving the comprehensive performance of micro magnetic devices.In this paper,nanoporous thin film iron cores were prepared by standard MEMS technolo-gy.The related characterization and testing of nanoporous thin film iron cores with different apertures were carried out,and the in-fluence of aperture size on the soft magnetic properties of thin films was analyzed.The conclusion of the experimental analysis pro-vides support for the determination of the preparation scheme and the improvement of the performance index.

关 键 词：纳米孔 薄膜铁芯 微型磁器件 制备工艺 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]