用于压力传感器的高精度自动标定系统  

High-precision Automatic Calibration System for Pressure Sensors

作　　者：王博 刘鹏[1] 杨兴[2] 姚嘉林 李润坤 唐硕 WANG Bo;LIU Peng;YANG Xing;YAO Jia-lin;LI Run-kun;TANG Shuo(School of Mechanical and Electrical Engineering,Yantai University,Yantai 264005,China;State Key Laboratory of Precision Measurement Technology and Instruments,Tsinghua University,Beijing 100084,China;School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China)

机构地区：[1]烟台大学机电汽车工程学院,山东烟台264005 [2]清华大学精密测试技术及仪器国家重点实验室,北京100084 [3]北京科技大学材料科学与工程学院,北京100083

出　　处：《仪表技术与传感器》2020年第9期85-88,92,共5页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目(61671271);北京市自然科学基金资助项目(L172040)。

摘　　要：针对现有压力传感器标定系统存在的精度差、自动化程度低等问题,文中选用GE DPS8000高精度压力传感器作为系统基准压力传感器,设计了多功能压力腔以及压力粗调与微调相配合的压力调节模块,并基于C++程序设计语言编写系统软件,搭建用于压力传感器的高精度自动标定系统。实验表明,搭建的标定系统可实现腔内压力在30 s内快速达到期望压力值,并且压力控制精度可达±1 Pa。通过对压力传感器进行自动标定测试实验,可实现压力传感器的全程自动标定。研究证明本系统具有自动化程度高、高精度标定等特点。In view of the poor precision and low degree of automation of the existing pressure sensor calibration system,GE DPS8000 high-precision pressure sensor was used as the system pressure reference.The multi-function pressure chamber was de-signed and fabricated,and the pressure coarse adjustment and fine adjustment were matched.The pressure regulation module,based on the C++programming language to write system software,finally successfully built a high-precision automatic calibration system for pressure sensors.Experiments show that the calibration system built in this paper can achieve the desired pressure value quickly within 30 seconds,and the pressure control accuracy can reach±1 Pa.Through the automatic calibration test of the pres-sure sensor,the entire process of the pressure sensor can be automatically calibrated.The research proves that the system has the characteristics of high degree of automation,high precision calibration,etc.

关 键 词：压力传感器 高精度 自动化 标定 

分 类 号：TH71[机械工程—测试计量技术及仪器]