钇和镁共掺杂ZnO薄膜的光学常数和介电性能  

Optical constant and dielectric properties of yttrium-magnesium co-doped ZnO thin films

作　　者：钟志有 田雨 陆轴 ZHONG Zhiyou;TIAN Yu;LU Zhou(Hubei Key Laboratory of Intelligent Wireless Communications,College of Electronic Information Engineering, South-Central University for Nationalities,Wuhan 430074,China)

机构地区：[1]中南民族大学电子信息工程学院,智能无线通信湖北省重点实验室,武汉430074

出　　处：《中南民族大学学报（自然科学版）》2020年第5期500-505,共6页Journal of South-Central University for Nationalities：Natural Science Edition

基　　金：湖北省自然科学基金资助项目(2011CDB418)。

摘　　要：以钇和镁共掺杂的氧化锌(ZnO:Y-Mg)陶瓷靶为溅射源,利用射频磁控溅射工艺在石英衬底上制备了ZnO:Y-Mg薄膜,基于紫外-可见分光光度计测量的透射率数据,通过光谱拟合方法计算了不同溅射时间时薄膜样品的光学参数.结果表明,溅射时间对ZnO:Y-Mg薄膜的折射率、消光系数、介电常数等具有不同程度的影响,所有样品的折射率在可见光波段均表现为正常色散特性,其变化关系符合Sellmeier色散模型.Yttrium-magnesium co-doped zinc oxide(ZnO:Y-Mg)thin films were deposited on the glass quartz substrates by RF magnetron sputtering technique,using the sintered ceramic target of ZnO mixed with Y2O3 and MgO as the sputtering source material.The optical transmittance data of samples were measured by ultraviolet-visible spectrophotometer.The optical parameters including refractive index,extinction coefficient and dielectric constant were determined by the method of optical spectrum fitting.The results indicate that the refractive index,extinction coefficient and dielectric constant were influenced by sputtering time in different extent.All the samples exhibit the normal dispersion characteristic in the visible region,and the refractive index dispersion curves of the thin films obey the Sellmeier′s dispersion model.

关 键 词：掺杂氧化物 薄膜 光学性能 

分 类 号：O484.1[理学—固体物理]