还原氮化对ZrO2薄膜SERS性能的影响研究  

Effect on SERS of ZrO2 Film via Reduction Nitridation Reaction

作　　者：裴媛 王学沛 刘燕梅 羡皓晗 吴明明 魏颖娜 刘海勇 陈颖 吴振刚 魏恒勇 PEI Yuan;WANG Xuepei;LIU Yanmei;XIAN Haohan;WU Mingming;WEI Yingna;LIU Haiyong;CHEN Ying;WU Zhengang;WEI Hengyong(School of Pharmacy,North China University of Science and Technology,Tangshan 063210,China;College of Materials Science and Engineering,North China University ofScience and Technology,Tangshan 063210,China;Testing and Analysis Center,North China University of Science and Technology,Tangshan 063210,China;Key Laboratory of Inorganic Material of Hebei Province,Tangshan 063210,China;Key Laboratory of Environment Functional Materials of Tangshan,Tangshan 063210,China)

机构地区：[1]华北理工大学药学院,唐山063210 [2]华北理工大学材料科学与工程学院,唐山063210 [3]华北理工大学分析测试中心,唐山063210 [4]河北省无机非金属材料重点实验室,唐山063210 [5]唐山市环境功能材料重点实验室,唐山063210

出　　处：《人工晶体学报》2020年第9期1609-1613,共5页Journal of Synthetic Crystals

基　　金：河北省自然科学基金(E2019209474);河北省高等学校自然科学研究青年基金(QN2020401)。

摘　　要：以八水氧氯化锆(ZrOCl2·8H2O)为原料制备前驱体溶液,采用旋涂工艺制备ZrO2薄膜,并对其进行还原氮化。利用XRD、FE-SEM、UV-Vis-Nir和Raman测试薄膜结构、光学性能及SERS效应。结果表明,还原氮化后薄膜中出现了氮氧化合物,颗粒明显,薄膜厚度约为0.77μm。薄膜的紫外可见近红外光谱在350~650 nm附近展现出较强的吸收。利用R6G作为探针分子研究了薄膜的SERS效应,结果表明,还原氮化后的氧化锆薄膜拉曼增强效应显著提升,拉曼增强因子为2.479×10^2。The precursor solution was prepared by using zirconium oxychloride octahydrate(ZrOCl2·8H2O)as the raw material,and the ZrO2 film was prepared by spin coating process and then processed via reduction and nitridation.The film structure,optical properties and SERS effect were tested by XRD,FE-SEM,UV-Vis-Nir and Raman.The results show that nitrogen oxides appeare in the film via reduction and nitridation,the particles are obvious,and the thickness of the film is about 0.77μm.There is a strong absorption peak near 350 nm to 650 nm in the ultraviolet-visible-near-infrared spectrum of the film.The SERS effect of the film was studied using R6G as a probe molecule,the results show that the SERS effect of the zirconia film is significantly improved via reduction and nitridation,and the Raman enhancement factor is 2.479×102.

关 键 词：氧化锆薄膜 还原氮化 表面增强拉曼散射 拉曼增强因子 

分 类 号：O657.3[理学—分析化学]