全自动硅片上下料机的称重控制系统开发  

Development of Weighing Database for Automatic Silicon Wafers Loading andUnloading Machine

作　　者：席思南 赵忠志 XI Sinan;ZHAO Zhongzhi(The 2nd Research Institute of CETC,Taiyuan 030024,China)

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《电子工艺技术》2020年第5期302-304,共3页Electronics Process Technology

摘　　要：太阳能电池片(硅片)制绒与刻蚀工艺前后,称重计算得出的硅片减膜量可以反映工艺设备中的液体成分是否达标。作为主要传输设备的全自动硅片上下料机配置了称重系统。为了解决人工称重带来的误差大、效率低与稳定性差等问题,通过FINS/UDP命令建立了PLC与上位机之间的数据交换,开发了称重数据库。通过大量生产测试后验证了称重系统的稳定性和可行性,有效地增强了全自动硅片上下料设备的自动化程度。Before and after the texturing and etching process of solar cells(silicon wafers),the film reduction amount of silicon wafer calculated by weighing can reflect whether the liquid content in the process equipment is up to the standard.As the main transmission equipment,the automatic wafer loading and unloading machine is equipped with weighing system.In order to solve the problems of large error,low efficiency and poor stability caused by manual weighing,the data exchange between PLC and upper computer is established by FINS/UDP command,and the weighing database is developed.The stability and feasibility of the weighing system are verified after a large number of production tests,which effectively enhances the automation degree of the automatic wafer loading and unloading equipment.

关 键 词：太阳能电池片 称重系统 FINS/UDP命令 数据库 

分 类 号：TM914[电气工程—电力电子与电力传动]