Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture  

作　　者：Ye Wan Wenhui Guo Jin Xiao Dazhou Yan Xiong Zhao Shuhu Guo Jianhua Liu Qifan Zhong Tao Yang Yu Zhao Xin Chang Xin Gao 

机构地区：[1]School of Metallurgy and Environment,Central South University,Changsha 410083,China [2]China ENFI Engineering Co.,Ltd.,Beijing 100038,China [3]National Engineering Laboratory of Polysilicon Materials Preparation Technology,Luoyang 471023,China [4]National Engineering Laboratory of Efficient Utilization of Refractory Nonferrous Metal Resources,Central South University,Changsha 410083,China [5]School of Chemical Engineering and Technology,Tianjin University,Tianjin 300072,China

出　　处：《Chinese Journal of Chemical Engineering》2020年第9期2248-2255,共8页中国化学工程学报（英文版）

基　　金：financial support from Industry Base Project supported by Ministry of Industry and Information Technology(0714-EMTC02-5593/13);Scientific Research and Development of Henan province(174200510014)。

摘　　要：Ultra-high-purity silicon tetrachloride(SiCl4)is demanded as an electronic-grade chemical to meet the stringent requirements of the rapidly developing semiconductor industry.The high requirement for ultra-high-purity SiCl4 has created the need for a high-efficient process for reducing energy consumption as well as satisfying product quality.In this paper,a mass of production technology of ultra-high-purity SiCl4 was successfully developed through chlorination reaction in the ultraviolet(UV)-based photo microreactor coupled with the distillation process.The influences of key operational parameters,including temperature,pressure,UV wavelength and light intensity on the product quality,especially for hydrogen-containing impurities,were quantified by the infrared transmittance of Fourier transform infrared spectroscopy(FT-IR)at 2185 cm^-1and 2160 cm^-1indicating that chara cteristic vib rational modes of Si-H bonds,as well as the operating conditions of distillation were also investigated as key factors for metal impurities removing.The advanced intensification of SiCl4 manufactured by the integration of photo microreactor and distillation achieves the products with superior specifications higher than the standard commercial products.

关 键 词：SiCl4 Process intensification PHOTOCHLORINATION MICROREACTOR DISTILLATION 

分 类 号：TQ127.2[化学工程—无机化工]