微波等离子体反应器的设计与仿真  

Design and Simulation of Microwave Plasma Reactor

作　　者：卫博 郭海霞 丁叁叁 金鑫[1] 唐章宏[1] 王群[1] Wei Bo;Guo Haixia;Ding Sansan

机构地区：[1]北京工业大学 [2]中车青岛四方机车车辆股份有限公司

出　　处：《安全与电磁兼容》2020年第4期87-92,共6页Safety & EMC

基　　金：国家重点研发计划子任务(2016YFB1200602-37)。

摘　　要：针对微波等离子体的激发及应用实验,设计一种具有大面积、高能量密度等离子体的微波反应器。首先通过理论计算圆柱型微波反应器的基本参数,分析微波反应器的工作模式与微波传输模式相互激励原理。然后利用电磁仿真优化关键结构参数对微波反应器内电场强度与电场分布的影响,验证了模式数量的叠加实现微波反应器内电场强度和电场分布的叠加。最后依据最优参数制造了微波反应器样机,进行了等离子体激发实验,利用产生的微波等离子体制备出纳米材料。Aiming at the excitation and application experiment of microwave plasma,a microwave reactor with large area and high energy density plasma was designed.Firstly,the basic parameters of the cylindrical microwave reactor were calculated theoretically,and the mutual excitation principle between the working mode of the microwave reactor and the microwave transmission mode was analyzed.Then,electromagnetic simulation was used to optimize the influence of key structural parameters on the electric field intensity and electric field distribution in the microwave reactor.Finally,the microwave reactor prototype was manufactured according to the optimal parameters,and the plasma excitation experiment was carried out,and the nano materials were prepared by using the generated microwave plasma.

关 键 词：微波反应器 高能量密度 等离子体 电磁仿真 

分 类 号：TB383.1[一般工业技术—材料科学与工程] O53[理学—等离子体物理]