一种基于氧化石墨烯的高性能声表面波湿度传感器  

High-Performance SAW Humidity Sensor Based on Graphene Oxide

作　　者：张永威 谭秋林[1] 张文栋[1] Zhang Yongwei;Tan Qiulin;Zhang Wendong(Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2020年第9期720-726,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(U1837209)。

摘　　要：提出了一种基于氧化石墨烯(GO)的声表面波(SAW)湿度传感器,利用铜环辅助滴铸法在LiNbO3表面制备氧化石墨烯薄膜作为湿度敏感层。建立了声表面波传感器叉指电极的三维传热模型,得到了基底表面相速度和温度灵敏度随切向的分布,对传感器的谐振频率和温度稳定性进行了优化。传感器静态和动态的实验结果表明,在10%RH^90%RH的湿度测量范围内,传感器的频移可达2.94 MHz,湿度灵敏度达36.8 kHz/%RH,具有良好的湿度-频率特性。传感器的响应和恢复时间分别为10.8 s和3.7 s,迟滞性误差不超过2%。此外,测试结果说明该传感器具备良好的可重复性和稳定性,在智能家居和工业湿度监测领域具有广阔的应用前景。A surface acoustic wave(SAW)humidity sensor based on graphene oxide(GO)was proposed.Graphene oxide film as humidity sensitive layer was fabricated on the surface of LiNbO3 by using copper ring assisted drop casting method.A three-dimensional heat transfer model of the interdigital electrode of the SAW sensor was established,and the distributions of phase velocity and temperature sensitivity on the substrate surface with the tangent direction were obtained,and the resonance frequency and temperature stability of the sensor were optimized.The static and dynamic experimental results of the sensor show that in the humidity measurement range of 10%RH-90%RH,the frequency shift of the sensor reaches 2.94 MHz,the humidity sensitivity reaches 36.8 kHz/%RH,and the sensor has good humidity-frequency characteristics.The response time and recovery time of the sensor are 10.8 s and 3.7 s,respectively,and the hysteresis error does not exceed 2%.In addition,the test results show that the sensor has good repeatability and stability.The sensor has broad application prospects in the fields of smart home and industrial humidity monitoring.

关 键 词：声表面波(SAW) 辅助滴铸法 LINBO3 湿度传感器 氧化石墨烯(GO) 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]