基于双锥纳米多孔薄膜的高性能电渗微泵  

High-Performance Electroosmotic Micropump Based on Double-Conical Nanopore Membranes

作　　者：任芳玲 陈琴华 武伦 冉凤英 刘经健 罗丹 李鹏 Ren Fangling;Chen Qinhua;Wu Lun;Ran Fengying;Liu Jingjian;Luo Dan;Li Peng(Department of Dongfeng Hospital of Hubei University of Medicine,Shiyan 442000,China;College of Pharmacy,Hubei University of Medicine,Shiyan 442000,China;Hubei Key Laboratory of Wudang Local Chinese Medicine Research,Shiyan 442000,China;Shenzhen Baoan Authentic TCM Therapy Hospital,Shenzhen 518102,China)

机构地区：[1]湖北医药学院附属东风医院,湖北十堰442000 [2]湖北医药学院药学院,湖北十堰442000 [3]武当特色中药研究湖北省重点实验室,湖北十堰442000 [4]深圳市宝安纯中医治疗医院,广东深圳518102

出　　处：《微纳电子技术》2020年第9期727-734,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(81872509);湖北医药学院研究生科技创新资助项目(YC2019027)。

摘　　要：开发了一种具有高流速、长期稳定的低压电渗微泵芯片。该泵由厚度约12μm、具有高密度双锥纳米孔(孔径约30 nm)的径迹刻蚀薄膜制成。研究证实其可实现低驱动电压(~10 V)下的高电渗流,最大规范化流速约为0.05 mL/(min·cm^2·V),同时产生约2.2 kPa的压力,微泵的高性能主要归因于双锥孔尖端区域的电场聚焦效应。其次,实验表明不同工作溶液体系下流速随外加电压的增加而线性增加,可以通过调控电压大小精确控制流速。在稳定性方面,微泵连续工作3 h流速下降约10%,不同微泵间流速差异小于15%,同一微泵日间流速差异小于10%,表明微泵具有较好的稳定性及重复性。A high flow-rate and low-voltage electroosmotic on-chip micropump with long-term stability was developed.The micropump is fabricated from a track-etched membrane with a thickness of about 12μm and a high-density double-conical nanopores with diameters of about 30 nm.The research results show that the micropump can achieve a high electroosmotic flow at low driving voltage(~10 V).The maximum normalized flow rates is about 0.05 mL/(min·cm^2·V),while a pumping pressure of about 2.2 kPa is generated.The high performance of the micropump is mainly attributed to the electric field focusing effect in the tip region of the double-conical nanopores.Moreover,the flow rate increases linearly with the increase of applied voltages in different pumping working solutions,and the flow rate can be precisely controlled by adjusting the voltage.For the stability,the flow rate of the micropump decreases about 10% after the continuous operation for three hours,the flow rate difference between different micropumps is less than 15%,and the day-to-day flow rate difference of the same micropump is less than 10%,indicating that the micropump has good stability and repeatability.

关 键 词：电渗泵 电渗流 微流控芯片 纳米孔 径迹刻蚀薄膜 

分 类 号：O35[理学—流体力学] TH703[理学—力学]