激光陀螺稳频器压电陶瓷片微位移自动化测量  

Micro-displacement Automatic Measurement for Piezoelectric Ceramic Slices of Laser Gyroscope Frequency Stabilizer

作　　者：李欣 王晓东[1,2] 罗怡[1,2] 任同群[1,2] Li Xin;Wang Xiaodong;Luo Yi;Ren Tongqun(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian,Liaoning 116024,China;Key Laboratory for Precision&Non-traditional Machining of the Ministry of Education,Dalian University of Technology,Dalian,Liaoning 116024,China)

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024 [2]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024

出　　处：《机电工程技术》2020年第9期89-92,160,共5页Mechanical & Electrical Engineering Technology

基　　金：国家“高档数控机床与基础制造装备”科技重大专项课题(编号:2013ZX04001091)。

摘　　要：激光陀螺稳频器采用双压电陶瓷片作为驱动元件,用来实现对激光陀螺谐振腔长的双向调节,稳定激光陀螺的工作频率。压电陶瓷片要求配对使用,并具有相同的性能,在相同的驱动电压下具有近似一致的位移量,因此,需要对压电陶瓷片的微位移进行精确测量并配对使用。实验研究了充放电次数对压电陶瓷片位移量的影响,形成了基于高精度电感测微仪的双测头测量工艺方法;为实现压电陶瓷片的批量测量,设计了能够实现批量自动化测量的技术方案,并研制了设备。设备采用真空吸附方式拾取压电陶瓷片,避免机械夹取的意外损伤;利用球面轴承和弹性探针组合,保证上电极与陶瓷片接触均匀。实验结果表明,设备测量的重复精度优于0.06μm,能有效保证陶瓷片的一致性。Dual piezoelectric ceramic slices are used in the frequency stabilizer of laser gyroscope as the driving element to stabilize the working frequency of the gyroscope by adjusting the resonant cavity length of the laser gyroscope bi-directionally. It is required that the paired piezoelectric ceramic slices have the same performance, which means that the displacements are close to each other under the same driving voltage. It is necessary to measure the micro displacement of the piezoelectric ceramic slices accurately and use them in pairs. The effect of charge and discharge times on the displacement of the slices was experimentally studied and a measurement procedure based on dual high-precision inductive was formed to achieve precision measurements. For the needs of batch measurement of piezoelectric ceramic slices, an automatic micro displacement measurement technology scheme which can achieve batch measurement was conceived, and the equipment was developed. The piezoelectric ceramic slices were picked up by using vacuum adsorption to avoid accidental damage from mechanical clamping. The combination of spherical bearings and elastic probes was selected to ensure that the upper electrode and the slices were in uniform contact. The experimental results show that the repeatability of the equipment measurement is better than 0.06 μm, which can ensure the consistency of the slices effectively.

关 键 词：激光陀螺稳频器 压电陶瓷片 微位移测量 自动化设备 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术] TM282[自动化与计算机技术—计算机科学与技术]