超精密机床液体静压导轨静动态特性研究  

Research on Static and Dynamic Characteristic of Hydrostatic Slide for Ultra-precision Machine Tools

作　　者：朴银川 张宣 张飞虎[1] PIAO Yin-chuan;ZHANG Xuan;ZHANG Fei-hu(School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001

出　　处：《组合机床与自动化加工技术》2020年第10期1-4,8,共5页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家科技重大专项资助项目(2017ZX04022001-204);国家重点研发计划资助项目(2016YFB1102204)。

摘　　要：高精度高刚度导轨是实现脆性材料高效高表面完整性加工的前提条件。以超精密机床的液体静压导轨为研究对象,设计了液体静压导轨结构,建立了导轨的三维模型与数学模型,并通过数值仿真,预测出不同参数条件下液体静压导轨的静态特性与动态特性。开展了超精密机床液体静压导轨静动态特性实验,验证模型的可靠性,结果表明模型预测值与实验测量结果相近,表明模型可靠,为实现脆性材料的高效高表面完整性加工奠定了理论基础。High accuracy and high stiffness slides are preconditions for achieving the high-efficiency and high-surface integrity machining of brittle materials.By taking the hydrostatic slide for ultra-precision machine tools as the research object,Designing the structure of hydrostatic slide,establishing 3D models and mathematics models of the hydrostatic slide,and predicting the static and dynamic characteristics of hydrostatic slide in different parameter conditions by numerical simulation.Developing the experiments of hydrostatic slide of ultra-precision machine tool to verify the reliability of models.The results showed that the prediction results of the models and the measurement results of the experiments were similar,which showed the models were reliable.It lays a theoretical foundation for achieving high-efficiency and high-surface integrity machining of brittle materials.

关 键 词：超精密加工 机床 液体静压导轨 静动态特性 

分 类 号：TH161[机械工程—机械制造及自动化] TG65[金属学及工艺—金属切削加工及机床]