基于脉间反馈脉冲电源的硅晶体电火花线切割加工研究  

Research on WEDM of Silicon Crystal Based on a Pulse Interval Feedback Pulse Power Source

作　　者：邵程杰 邱明波[1] 刘志东[1] 王文昭 张明[1] SHAO Chengjie;QIU Mingbo;LIU Zhidong;WANG Wenzhao;ZHANG Ming(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016

出　　处：《电加工与模具》2020年第5期14-18,26,共6页Electromachining & Mould

基　　金：国家自然科学基金资助项目(51675272、U1532106)。

摘　　要：为解决传统硅晶体电火花线切割加工伺服控制方法的缺陷,针对由进给速度和脉宽的变化导致的加工质量、形状精度变化问题,通过实验论证了脉间和放电概率之间的关系,并基于关系拟合方程确定了脉间随着实时放电概率调整的伺服控制策略;在此基础上,设计优化了脉间反馈闭环控制脉冲电源,实现了实时放电概率恒定;此外,分析了不同的进给速度、脉宽等参数对加工质量、放电概率等的影响,确定了最优加工工艺参数,并将该电源应用到普通机床中进行了实际切割加工。In order to solve the defects of the traditional servo control method used in the wire-cut electrical discharge machining(WEDM)of silicon crystal,mainly aimed at the problem that the processing quality and shape accuracy changed due to the change of the feed speed and pulse width,in this paper,the relationship between pulse interval and discharge probability is demonstrated experimentally,and a servo control strategy that adjusts pulse intervals with real-time discharge probability is determined based on the relationship fitting equation.Based on this,this paper designs and optimizes the pulse-interval feedback closed-loop controlled pulse power source to achieve constant real-time discharge probability.In addition,this paper also analyzes the effects of different feed speeds,pulse widths and other parameters on processing quality,discharge probability,etc.,determines the optimal processing parameters,and applies the power source to ordinary machine tools for actual cutting machining.

关 键 词：电火花线切割加工 硅晶体 脉间反馈 闭环控制 脉冲电源 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]