计量光栅传感器超高测量分辨力探究及应用  

Research and Application of Super-high Measurement Resolution of Measuring Grating Sensor

作　　者：秦常贵[1] QIN Chang-gui(Guangdong Songshan Polytechnic College,Shaoguan 512126,China)

机构地区：[1]广东松山职业技术学院,广东韶关512126

出　　处：《传感器世界》2020年第9期13-19,共7页Sensor World

摘　　要：计量光栅传感器主要用于线位移和角位移的测量。通过辨向电路对莫尔条纹的移动方向进行正确判断,莫尔条纹具有的位移放大作用和误差平均效应使计量光栅传感器具有较高的测量分辨力;对莫尔条纹进行的细分技术,进一步大大提高了计量光栅传感器的测量分辨力,从而使其达到纳米级超高测量分辨力。计量光栅传感器由于具有分辨力极高等一系列优点,因而在数控伺服系统、坐标镗床等高精度数控机床、高精度测试仪器、大规模集成电路制造设备等中被广泛应用。The measuring grating sensor based on the moire fringe phenomenon produced by grating,which is mainly used for the measurement of linear displacement and angular displacement.The measuring gratingscnsor can judge the moving direction of moire fringecorrectly through the direction discrimination circuit,soas to realize the accurate mcasurement of the measurcddisplacement;the displacement amplification and erroraverage effect of moire fringe make the measurementresolution of mcasuring grating sensor higher;thesubdivision technology of moire fringe further improvcsthe measurement of the measuring grating sensor,theresolution can reach nanoscale.The measuring gratingscnsor has a series of advantages,such as simplemcasuring structure,high mcasuring accuracy,highrcsolution.large mcasuring rangc,strong anti-interfcrcnceability and dynamic measurement,so it is widely uscd in CNC servo system,coordinate boring machine and other high-precision CNC machine tools,high-precision testinginstruments,large-scale integrated circuit manufacturingequipment and so on.

关 键 词：计量光栅传感器 超高测量分辨力 莫尔条纹 辨向电路 细分技术 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]