碳和金属纳米材料基柔性应力传感器及其可穿戴应用  

Flexible Stress Sensor Based on Carbon and Metal Nanomaterials and Its Wearable Applications

作　　者：陈彤善 贺辛亥[1,2] 任研伟 张亮 陈东圳 Chen Tongshan;He Xinhai;Ren Yanwei;Zhang Liang;Chen Dongzhen(School of Mechanical&Electrical Engineering,Xi′an Polytechnic University,Xi'an 710048,China;Key Laboratory of Functional Sensing Fiber and Special-Shaped Weaving Technology in Textile Industry,School of Materials Science&Engineering,Xi′an Polytechnic University,Xi'an 710048,China)

机构地区：[1]西安工程大学机电工程学院,西安710048 [2]西安工程大学材料工程学院,纺织行业功能感知纤维及异形织造技术重点实验室,西安710048

出　　处：《微纳电子技术》2020年第10期793-803,834,共12页Micronanoelectronic Technology

基　　金：陕西省教育厅2020年度自然科学一般专项科学研究计划项目(20JK0658)。

摘　　要：简述了碳和金属纳米材料基柔性应力传感器的材料、结构和制备工艺,以及在可穿戴电子设备中应用的研究现状。重点介绍了碳和金属纳米材料基柔性应力传感器灵敏度、稳定性及响应时间等性能的研究进展和阻碍因素,并探讨了传感器的能耗和自供电问题。通过多孔碳纳米材料、碳纳米材料与柔性纤维复合材料以及设计的具有分层结构的金属纳米材料基传感元件的制备,可实现传感器对微小应力的高灵敏度、高稳定性以及快速响应。最后给出了碳和金属纳米材料基柔性应力传感器在可穿戴电子设备中的应用,并对柔性应力传感元件材料的发展方向进行了展望。The materials,structure and preparation process of flexible stress sensors based on carbon and metal nanomaterials and the research status of the application in wearable electronic devices are briefly described.The research progress and obstructive factors of the sensitivity,stability and response time of flexible stress sensors based on carbon and metal nanomaterials are emphatically introduced,and the energy consumption and self-power supply of the sensors are discussed.Through the preparation of sensing elements based on porous carbon nanomaterials,composite materials of carbon nanomaterials and flexible fibers,and designed metal nanomaterial with layered structure,the sensors can realize high sensitivity,high stability and fast responding to tiny stresses.Finally,the applications of flexible stress sensors based on carbon and metal nanomaterials in wearable electronic devices are presented,and the future development directions of flexible stress sensing element materials are prospected.

关 键 词：柔性应力传感器 可穿戴电子设备 碳纳米材料 金属纳米材料 传感元件 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]