GR/CNT-PDMS柔性应变传感器的制备与性能  

Preparation and Properties of GR/CNTs-PDMS Flexible Strain Sensor

作　　者：秦文峰[1] 王新远 李亚云 艾璇 符佳伟 Qin Wenfeng;Wang Xinyuan;Li Yayun;Ai Xuan;Fu Jiawei(Aviation Engineering Institute,Civil Aviation Flight University of China,Guanghan 618307,China)

机构地区：[1]中国民用航空飞行学院航空工程学院,四川广汉618307

出　　处：《微纳电子技术》2020年第10期804-809,854,共7页Micronanoelectronic Technology

基　　金：民航局教育人才类项目(14002600100017J170);四川省2019年大学生创新创业训练计划项目(S201910624004);中国民用航空飞行学院研究生创新基金项目(X2020-7)。

摘　　要：可穿戴设备的兴起对传感器的灵敏度和重复性等性能提出了更高的要求,为此,制备一种工艺简单、灵敏度高、应变范围宽的柔性传感器就显得尤为重要。通过刮涂法在聚二甲基硅氧烷(PDMS)上涂覆了石墨烯(GR)和碳纳米管(CNT)构成导电网络,获得高灵敏度和宽应变范围的GR/CNT-PDMS柔性应变传感器。GR/CNT-PDMS柔性应变传感器在0.01%应变时灵敏度为650,响应时间约为150 ms;其在拉伸1000次、30%的应变后弹性回复率为3.42%,具有良好回弹性和重复性,能够用于检测心率及关节活动等人体活动,在可穿戴设备制造和智能机器人皮肤制造等领域有广阔的发展空间。The rise of wearable devices has put forward higher requirements on the sensitivity and repeatability of sensors,thus it is particularly important to fabricate a flexible sensor with simple technology,high sensitivity and wide strain range.The graphene(GR)and carbon nanotubes(CNTs)were coated on polydimethylsiloxane(PDMS)by scraping and coating method to compose a conductive network and then obtain a GR/CNTs-PDMS flexible strain sensor with high sensitivity and wide strain range.When the strain is 0.01%,the sensitivity of the GR/CNTsPDMS flexible strain sensor is 650 and the response time is about 150 ms.After stretching 1000 times with a strain of 30%,the elastic recovery rate of the GR/CNTs-PDMS flexible strain sensor is 3.42%,showing that the sensor has good elasticity and repeatability.The sensor can be used to detect heart rate and human activities such as joint movement and so on,and has broad development space in wearable device manufacturing,intelligent robot skin manufacturing and other fields.

关 键 词：碳纳米管(CNT) 石墨烯(GR) 柔性传感器 可穿戴设备 聚二甲基硅氧烷(PDMS) 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]