基于新型非周期高对比度亚波长光栅光电探测器  

Based on a new type of non-periodic high-contrast sub-wavelength grating photodetector

作　　者：杨晓伟 王明红 范鑫烨 于传洋 YANG Xiao-wei;WANG Minghong;FAN Xin-ye;YU Chuan-yang(School of Physics Science and Information Engineering,Liaocheng University,Shandong Key Laboratory of Optical Communication Science and Technology,Liaocheng,Shandong,252000)

机构地区：[1]聊城大学物理科学与信息工程学院,山东省光通信科学与技术重点实验室,山东聊城252000

出　　处：《光电子．激光》2020年第7期701-707,共7页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(11375081)资助项目。

摘　　要：本文提出了一种基于新型非周期高对比度亚波长光栅(High Contrast Subwavelength Grating,HCSG)的谐振腔增强型(Resonant Cavity Enhanced,RCE)光电探测器(Photodetector,PD),该器件是由顶部光栅型上反射镜、PIN光探测结构和分布式布拉格下反射镜(Distributed Bragg Reflectors,DBR)组成。新型非周期HCSG上反射镜是由局部湿法氧化后形成的Al2O3间隔层和非周期GaAs光栅组成,实现了850 nm波段TM模式偏振光的高反射会聚特性,反射率达到了86.5%且在1.5μm焦距处实现了光束会聚。下反射镜是由周期GaAs光栅和GaAs/Al0.9Ga0.1As DBR组成,周期GaAs光栅对入射光有偏振选择特性,对TM模式的偏振光透射率为96.1%,而对TE模式的偏振光透射率仅有3.7%。该器件利用了传输矩阵理论方法仿真模拟了其量子效率,量子效率达到了71.8%,半高全宽接近于0.1 nm。有效的解决了光电探测器的高量子效率和高响应带宽相互制约的问题,为下一代光通信系统的发展提供了良好的基础。This paper proposes a Resonant Cavity Enhance(RCE) photodetector(PD) based on a novel non-periodic high-contrast subwavelength grating(HCSG).The device is made of a top grating type It consists of upper reflector,PIN light detection structure and distributed Bragg reflector(DBR) lower reflector.The upper mirror is composed of a new type of non-periodic HCSG,which is composed of an Al2O3 spacer layer formed after partial wet oxidation and an aperiodic GaAs grating.It achieves high reflection and convergence characteristics of TM mode polarized light in the 850 nm band,and the reflectivity reaches 86.5% and Beam convergence is achieved at a focal length of 1.5 μm.The lower mirror is composed of a GaAs periodic grating and GaAs/Al0.9Ga0.1As DBR.The GaAs periodic grating has a polarization selective characteristic for incident light,the polarized light transmittance for TM mode is 96.1%,and the polarized light transmittance for TE mode is only 3.7%.The device uses the transfer matrix theory method to simulate its quantum efficiency,and the quantum efficiency reaches 71.8%;the Poisson equation and the carrier transport equation theoretical method are used to simulate the response bandwidth of the device,the full width at half maximum is close to 0.1 nm.It effectively solves the problem that the high quantum efficiency and high response bandwidth of photodetectors are mutually restricted,and provides a good foundation for the development of next-generation optical communication systems.

关 键 词：非周期亚波长光栅:光电探测器:偏振选择 反射会聚 

分 类 号：TN256[电子电信—物理电子学]