H2S gas sensor based on integrated resonant dual-microcantilevers with high sensitivity and identification capability  

作　　者：Lei Tang Pengcheng Xu Ming Li Haitao Yu Xinxin Li 

机构地区：[1]College of Life and Environmental Sciences,Shanghai Normal University,Shanghai 200234,China [2]State Key Lab of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China

出　　处：《Chinese Chemical Letters》2020年第8期2155-2158,共4页中国化学快报（英文版）

基　　金：supported by National Key R&D Program of China(No.2016YFA0200800);National Natural Science Foundation of China(NSFC,Nos.61874130,61604163,61527818,61604162);Key Research Program of Frontier Sciences of Chinese Academy of Sciences(No.QYZDJ-SSW-JSC001);the financial support of the Youth Innovation Promotion Association CAS(No.2017278)。

摘　　要：Detection of trace-level hydrogen sulfide(H2 S)gas is of great importance whether in industrial production or disease diagnosis.This research presents a novel H2 S gas sensor based on integrated resonant dual-microcantilevers which can identify and detect trace-level H2 S in real-time.The sensor consists of two integrated resonant microcantilever sensors with different functions.One cantilever sensor can identify H2 S by outputting positive frequency shift signals,while the other cantilever sensor will detect H2 S as a normally used cantilever sensor with negative frequency shifts.Combined the two cantilever sensors,the proposed gas sensor can distinguish H2 S from a variety of common gases,and the detection limit to H2 S of the sensor is as sensitive as below 1 ppb.

关 键 词：Gas sensor Resonant microcantilever N-doped nanoporous carbon Selective detection Hydrogen sulfide(H2S) 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] X851[自动化与计算机技术—控制科学与工程] X924.3[环境科学与工程—环境工程]