基于PSD的高精度微位移测量系统研究  

High Precision Micro Displacement Measurement System Based on PSD

作　　者：周森 张志伟[1,2] 蔡睿博 ZHOU Sen;ZHANG Zhi-wei;CAI Rui-bo(School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;Key Laboratory of Electronic Testing Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学信息与通信工程学院,山西太原030051 [2]中北大学电子测量技术重点实验室,山西太原030051

出　　处：《光学与光电技术》2020年第5期22-27,共6页Optics & Optoelectronic Technology

基　　金：山西省自然基金(201701D121060)资助项目。

摘　　要：为实现对古斯-汉欣位移的精确测量,设计了一个以一维PSD为核心的位移测量系统。根据PSD的原理和特性设计了后续的信号处理电路,STC89C52通过12位AD芯片TLC2578采集PSD输出的位置信号,经过处理传输到液晶LCD1602,再通过USB接口传输到上位机,以两种方式进行位移值显示,从而完成测量。实验结果表明,该系统在中心的测量精度较高,边缘的测量精度较低,测量误差在±10μm内。设计的系统不仅可用于对古斯-汉欣位移的测量,也可以用于其他微位移测量的实验中。In order to realize the accurate measurement of Goos-Hanchen displacement,a displacement measurement system based on one-dimensional PSD is designed. According to the principle and characteristics of PSD,the following signal processing circuit is designed. STC89 C52 collects the position signal output by PSD through 12 bit AD chip TLC2578,and then transmits it to LCD1602 through processing,and then transmits it through USB interface,and displays the displacement value in two ways. The measurement is completed. The experimental results show that the measurement accuracy of the system in the center is very good,and the measurement accuracy of the edge is low,the measurement error is within ±10 μm. The system can be used not only in the measurement of Goos-Hanchen displacement,but also in other experiments of micro displacement measurement.

关 键 词：位置敏感测量器 测量系统 上位机 信号处理电路 

分 类 号：TN247[电子电信—物理电子学]