暗场显微成像系统的光源研究  

Research on Light Source of Dark-Field Microscopic Imaging System

作　　者：韦瑶 高爱华[1] 秦文罡[1] WEI Yao;GAO Ai-hua;QIN Wen-gang(Xi'an Technological University,Shanxi Province Key Laboratory of Membrane Technology and Optical Test,College of Optoelectronic Engineering,Xi'an 710021,China)

机构地区：[1]西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《光学与光电技术》2020年第5期75-79,共5页Optics & Optoelectronic Technology

基　　金：国防科工局(JCKY201608A001);陕西省重点研发(2019GY-063)资助项目。

摘　　要：以正方形激光陀螺所用高反射镜疵病检测为例,分析了使用激光光源照明时,微米量级划痕形疵病存在检测盲区的现象。实际使用中激光以45°角入射到高反射镜上,疵病检测与陀螺使用时光源入射角相同,疵病形成的散射光通过显微成像光路成像在CCD上,结合实验数据探讨了宽度为微米量级划痕形疵病的成像情况。提出了一种新颖的激光照明方式,通过将光源设计成180°范围内无死角的全光幕照明方式克服了单一激光光源照明的检测盲区,无需旋转样品多次采集图像,避免了运动控制产生的测量误差,从而也简化了图像处理步骤,提高了检测效率和精度。According to the defect detection of high-reflection mirror used in square laser gyro,the phenomenon that there is a blind area in the detection of micrometer-level scratch-shaped defects when using a laser light source is analyzed. In practical use,the defect detection is the same as the incident angle of the light source when the gyro is used,a laser light source is incident on the high-reflection mirror at an angle of 45°,scattered light from defects is imaged on CCD through microscopic imaging light path,the imaging situation of micrometer-level scratch-shaped defects is discussed based on experimental data. A novel laser lighting method is proposed,the light source is designed as a full light curtain lighting mode without dead angle within 180°. The detection blind area of a single laser source illumination is overcome. The measurement error caused by the motion control is avoided. The image processing steps are simplified. The detection efficiency and accuracy are improved.

关 键 词：激光光源 高反射镜 划痕形疵病 检测盲区 显微成像 

分 类 号：TN247[电子电信—物理电子学]