浅论非SiC类的非金属材料加热器  

Briefly Discussion Non-SiC Heaters of Non-metallic Materials

作　　者：陈龙豪 钱虞清 金磊 朱从健 CHEN Longhao;QIAN Yuqing;JIN Lei;ZHU Congjian(Suzhou Huike Equipment Co.,Ltd.,Suzhou 215562,China)

机构地区：[1]苏州汇科机电设备有限公司,江苏苏州215562

出　　处：《电子工业专用设备》2020年第5期50-55,共6页Equipment for Electronic Products Manufacturing

摘　　要：针对MoSi2和石墨这两类非金属加热器的机械、化学特性以及耐温等指标,分别进行了分析和阐述,分析了此类加热器的优缺点,介绍了加热器的加工工艺过程,提出了此类加热器的使用特点和注意事项。This article analyzes and elaborates the mechanical,chemical properties and temperature resistance of the two types of non-metallic heaters,MoSi2 and graphite,respectively,analyzes the advantages and disadvantages of this type of heater,and introduces the heating process,puts forward the characteristics and precautions of this type of heater.

关 键 词：MoSi2加热器 石墨加热器 使用寿命 加热特性 使用注意事项 

分 类 号：TN305[电子电信—物理电子学]