长焦距绿光飞秒激光玻璃焊接  

Long Focal Length Green Femtosecond Laser Welding of Glass

作　　者：于淼 黄婷[1] 肖荣诗[1] Yu Miao;Huang Ting;Xiao Rongshi(High-Power and Ultrafast Laser Manufacturing Lab,Institute of Laser Engineering,Beijing University of Technology,Beijing100124,China)

机构地区：[1]北京工业大学激光工程研究院高功率及超快激光先进制造实验室,北京100124

出　　处：《中国激光》2020年第9期97-102,共6页Chinese Journal of Lasers

基　　金：国家重点研发计划(2017YFB1104803)。

摘　　要：超快激光玻璃焊接通常采用大数值孔径显微物镜对激光束进行聚焦,焊接严格限制在极小的焦体积内,且工作距离短,焊接速度低,焊缝宽度窄,不利于工业应用。采用75 W绿光飞秒激光器和255 mm长焦距扫描振镜实现了显示屏玻璃的非光学接触高速焊接,获得了焦点位置、脉冲能量和扫描速度对焊缝成形的影响规律以及焊接工艺窗口,无缺陷焊接速度可高达6 m/min。焊缝的剪切强度可高达20 MPa,并具有良好的耐水性和高透过率,说明本焊接方法具有广阔的应用前景。In ultrafast laser glass welding, the laser beam is usually focused by a large numerical aperture micro objective lens. The welding is strictly limited to a very small focal volume with short working distance, low welding speed, and narrow weld width, which limit its industrial applications. In this work, a 75 W green femtosecond laser equipped with a 255 mm-long focal scanning galvanometer was employed to achieve non-optical contact high-speed welding of display screen glasses. The effects of the focal position, pulse energy, and scanning speed on the weld formation were obtained, the welding process window was also obtained. An extremely high welding speed of 6 m/min was achieved without weld defects. In addition, the welds exhibited a shear strength of 20 MPa as well as good seal performance and transmittance, indicating that our method has a great prospect in industrial applications.

关 键 词：激光技术 玻璃 焊接 非光学接触 超快激光 长焦距 

分 类 号：TN249[电子电信—物理电子学]