焰熔法晶体生长炉内温度分布的仿真模拟  

Simulation of Temperature Distribution in Crystal Growth Furnace with Flame Fused Method

作　　者：裴晨 毕孝国 PEI Chen;BI Xiao-guo(Graduate Department,Shenyang Institute of Engineering,Shenyang 110136,Liaoning Province;School of New Energy,Shenyang Institute of Engineering,Shenyang 110136,Liaoning Province)

机构地区：[1]沈阳工程学院研究生部,辽宁沈阳110136 [2]沈阳工程学院新能源学院,辽宁沈阳110136

出　　处：《沈阳工程学院学报（自然科学版）》2020年第4期92-96,共5页Journal of Shenyang Institute of Engineering:Natural Science

摘　　要：在晶体生长条件下利用Fluent软件模拟H2和O2的混合燃烧,并通过有限元分析法计算了在不同工况条件下生长室内温度场的分布及晶体熔帽表面所受的压力。结果表明:H2和O2的流量比为2:1时,生长室内的温度分布最为合理。此外,增加O2流量时,晶体熔帽表面压力显著增长;增加H2流量时,晶体熔帽表面压力涨幅很小。Fluent software was used to simulate the mixed combustion of H2,O2 under the condition of crystal growth,and the temperature field distribution and the pressure on the surface of the crystal melt cap in the growing room under different working conditions were calculated by the finite element analysis method.The result show that the H2,O2 flow rate ratio at 2 to 1 is the most reasonable.When increasing the O2 flow rate,the surface pressure of the crystal melt cap increases significantly,and the surface pressure of the crystal melt cap increases very little when increasing the H2 flow rate.

关 键 词：焰熔法 晶体生长炉 温度分布 仿真模拟 

分 类 号：O782[理学—晶体学]