Regular uniform large-area subwavelength nanogratings fabricated by the interference of two femtosecond laser beams via cylindrical lens  

作　　者：Kaiqiang Cao Long Chen Ke Cheng Zhenrong Sun Tianqing Jia 曹凯强;陈龙;程可;孙真荣;贾天卿(State Key Laboratory of Precision Spectroscopy,School of Physics and Electronic Science,East China Normal University,Shanghai 200241,China;Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China)

机构地区：[1]State Key Laboratory of Precision Spectroscopy,School of Physics and Electronic Science,East China Normal University,Shanghai 200241,China [2]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China

出　　处：《Chinese Optics Letters》2020年第9期79-83,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (Nos. 91950112,11474097,91950112);the Science and Technology Commission of Shanghai Municipality (No. 19ZR1414500);the Open Fund of the State Key Laboratory of High Field Laser Physics (Shanghai Institute of Optics and Fine Mechanics)。

摘　　要：Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings(RUSNGs)on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors(including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.

关 键 词：subwavelength nanogratings two-beam interference surface plasmon polariton structural coloring 

分 类 号：TN24[电子电信—物理电子学] O436.1[机械工程—光学工程]