离子束辐照对CoFeB薄膜磁性质的影响  

Effects of ion beam irradiation on magnetic properties of CoFeB films

作　　者：裴科 张瑞轩 杨利廷 车仁超[1] PEI Ke;ZHANG Rui-xuan;YANG Li-ting;CHE Ren-chao(Laboratory of Advanced Materials,Fudan University,Shanghai 200438,China)

机构地区：[1]复旦大学,先进材料实验室,上海200438

出　　处：《电子显微学报》2020年第5期508-512,共5页Journal of Chinese Electron Microscopy Society

基　　金：中国科学技术部资助项目(No.2018YFA0209102);国家自然科学基金资助项目(Nos.11727807,51725101,51672050,61790581)。

摘　　要：聚焦离子束系统(focus ion beam,FIB)作为一种成熟的材料加工技术,在磁性材料的加工中得到广泛应用。然而,在利用FIB对磁性材料的加工过程中,难免会因为离子的辐照对样品产生影响。本文以CoFeB薄膜为研究对象,研究辐照强度对样品磁性质的影响。对于利用离子束辐照来调控薄膜性质具有指导意义。As a mature material processing technology,focus ion beam(FIB)has been widely used in the processing of magnetic materials.However,in the processing of magnetic materials using FIB,the irradiation of ions will inevitably affect the samples.In this paper,the effects of irradiation intensity on the magnetic properties of CoFeB films were studied.It may help to control the properties of thin films by using ion beam irradiation.

关 键 词：CoFeB薄膜 离子辐照 磁畴结构 洛仑兹透射电子显微镜 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] O469[金属学及工艺—金属学]