真空环境下低损耗高反射光学元件性能退化特性  

Performance degradation of low-loss highly-reflective mirrors under vacuum environment

作　　者：许彬 李斌成 高椿明 王强[2] 郭小红 孙启明 XU Bin;LI Bincheng;GAO Chunming;WANG Qiang;GUO Xiaohong;SUN Qiming(School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China,Chengdu 610054, China;Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China)

机构地区：[1]电子科技大学光电科学与工程学院,成都610054 [2]中国科学院光电技术研究所,成都610209

出　　处：《激光技术》2020年第6期768-772,共5页Laser Technology

基　　金：国家自然科学基金委员会与中国工程物理研究院联合基金资助项目(U1830132)。

摘　　要：为了研究真空环境对光学薄膜的影响,将离子辅助沉积制备的1064nm强光反射膜样品放置于真空度优于1×10-5Pa的不锈钢真空室,实验观测其反射率和吸收损耗随放置时间的变化。结果表明,样品在真空环境放置335h后,其反射率从99.9823%下降到了99.9543%,吸收损耗从6.8×10-6上升到了59.5×10-6,用酒精乙醚混和液擦拭后其光学性能完全恢复,样品表面的污染层厚度随时间增加;操作过程中的人为因素是导致强光反射膜元件光学性能持续下降的主要原因。这一结果对高能/高功率激光光学元件在真空应用环境中稳定性的提高是有帮助的。In order to investigate the influence of vacuum environment on the performance of the optical coatings,a low-loss highly reflective(HR)coating sample at 1064nm fabricated by ion assisted deposition was stored in a stainless steel vacuum chamber with pressure less than 1×10^-5Pa.And we observed the variation of absorptance and reflectance of the HR sample.The experimental results show that the reflectance of the sample decreased from 99.9823%to 99.9543%and the absorptance increased from 6.8×10 to 59.5×10 after 335h of storage in the vacuum chamber.By wiping the sample with mixed alcohol/ether solution,the optical performance of the sample is totally recovered.Combined with theoretical analysis,we concluded that a thickness increase of an organic contamination layer on the coating surface and human errors during the experimental procedure are major sources for the performance degradation of the HR coating.The results are helpful to improve the stability of high energy/high power laser optics used in vacuum.

关 键 词：薄膜 污染 激光量热法 光腔衰荡 吸收损耗 反射率 真空环境 

分 类 号：O484.41[理学—固体物理]