Hybrid calibration method of a wide-view-angle Mueller polarimeter for hyper-numerical-aperture imaging systems  

作　　者：Jianhui Li Yanqiu Li Ke Liu Guodong Zhou Lihui Liu Meng Zheng 李建慧;李艳秋;刘克;周国栋;刘丽辉;郑猛(Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China

出　　处：《Chinese Optics Letters》2020年第8期54-58,共5页中国光学快报（英文版）

基　　金：supported by the Major Scientific Instrument Development Project of National Natural Science Foundation of China(No.11627808);National Natural Science Foundation of China(No.61435005);National Science and Technology Major Project(No.2017ZX02101006-001)。

摘　　要：Polarization aberration of hyper-numerical-aperture projection optics should be measured accurately in order to control it exactly and ensure favorable imaging performance.A hybrid calibration method combining the Fourier analysis method and the eigenvalue calibration method is proposed.A wide-view-angle Mueller polarimeter(WMP)is exemplified to demonstrate the capability of the proposed calibration method,which can calibrate the polarimeter and determine the error budget of polarizing elements in the polarimeter.In addition,an experimental setup and a WMP are developed in-house to implement the hybrid calibration method.

关 键 词：polarimetric imaging measurement calibration 

分 类 号：TH74[机械工程—光学工程]