硅-有机复合集成电光调制器的优化与制备  

Optimal design and preparation of silicon-organichybrid integrated electro-optic modulator

作　　者：邹艳慧 王艺蒙 张小雪 武震林 陈卓[2] 薄淑晖[2,5] 刘若男 李志华 王迪[4] 谭庆贵[4] 谷一英[1] 赵明山 韩秀友 ZOU Yan-hui;WANG Yi-meng;ZHANG Xiao-xue;WU Zhen-lin;CHEN Zhuo;BO Shu-hui;LIU Ruo-nan;LI Zhi-hua;WANG Di;TAN Qing-gui;GU Yi-ying;ZHAO Ming-shan;HAN Xiu-you(Institute of Optoelectronic Engineering and Instrumentation Science, Dalian University of Technology, Dalian 116024, China;Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China;Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China;Xi′an Institute of Space Radio Technology, Xi′an 710100, China;College of Sciences, Minzu University of China, Beijing 100081, China)

机构地区：[1]大连理工大学光电工程与仪器科学学院,辽宁大连116024 [2]中国科学院理化技术研究所,北京100190 [3]中国科学院微电子研究所,北京100029 [4]西安空间无线电技术研究所,陕西西安710100 [5]中央民族大学理学院,北京100081

出　　处：《光学精密工程》2020年第10期2138-2150,共13页Optics and Precision Engineering

基　　金：国家重点研发计划项目(No.2019YFB2203202);国家领域基金重点项目(No.61404130403);国家自然科学基金资助项目(No.61875028,No.62075026);辽宁省高等学校创新人才支持计划(No.LR2019017);大连市科技创新基金资助项目(No.2018J11CY006);大连理工大学大学生创新训练项目(No.2020101412100010090,No.2019101412100010059)。

摘　　要：硅-有机复合光子集成技术充分发挥了硅光的大规模集成优势和有机聚合物材料的高电光系数优势,在高性能集成微波光子系统中极具应用潜力。本文对硅-有机复合集成电光调制器结构进行了较为全面地优化设计和初步制备研究。电光有机聚合物填充在硅Slot波导的狭缝中,优化Slot波导结构得到光场限制因子为0.32,使得光波场与射频电场高度重合,提高了电光调制效率。采用锥型波导模式转换结构实现Strip-to-Slot的低损耗耦合,耦合效率为99.55%。重点分析了电极长度、宽度等参数对调制器频率响应的影响,优化得到3 dB带宽为77 GHz,半波电压-长度积为0.045 V·cm。根据仿真结果设计了用于制备调制器的MASK。实验制备了Slot波导并进行了聚合物的填充实验研究,获得了良好的结果。Silicon-organic hybrid photonic integration technology fully utilizes the advantages of large-scale integration of silicon photonics and the high electro-optic coefficient of organic polymer materials.This accords great application potential in high-performance integrated microwave photonics systems to it.This paper discusses a comprehensive optimal structural design and preliminary preparation of a silicon-organic hybrid integrated electro-optic modulator.The slit of the silicon slot waveguide is filled with electro-optic organic polymer.The optical field confinement factor reaches 0.32 when the structure of the slot waveguide is optimized.The optical wave field and radio-frequency electric field overlap considerably,thereby improving the electro-optic modulation efficiency.The tapered waveguide mode conversion structure is used to achieve low-loss coupling between the strip and slot waveguides with a acoupling efficiency of 99.55%.The frequency modulation response is addressed by analyzing the influence of the electrode length and width.The 3 dB bandwidth is optimized to 77 GHz,and the half-wave voltage-length product reaches 0.045 V·cm.The MASK used in manufacturing the modulator is designed based on the simulation results.Experiments involving the slot waveguide and the filling polymer in the slot waveguide are performed with good results.

关 键 词：电光调制器 硅-有机复合集成 Slot波导 Strip-to-Slot模式转换器 半波电压-长度积 

分 类 号：TN256[电子电信—物理电子学] TN252