基于In2O3的高灵敏度乙醇气体传感器  

High Sensitive Ethanol Gas Sensor Based on In2O3

作　　者：杜帅航 王开松[1] 张文惠 沈超 许宁[3] Du Shuaihang;Wang Kaisong;Zhang Wenhui;Shen Chao;Xu Ning(School of Mechanical Engineering,Anhui University of Science and Technology,Huainan 232001,China;Jiangsu Province Key Laboratory for Advanced Technology in Environmental Protection,Yancheng 224051,China;School of Mechanical Engineering,Yancheng Institute of Technology,Yancheng 224051,China)

机构地区：[1]安徽理工大学机械工程学院,安徽淮南232001 [2]江苏省新型环保重点实验室,江苏盐城224051 [3]盐城工学院机械工程学院,江苏盐城224051

出　　处：《微纳电子技术》2020年第11期894-898,共5页Micronanoelectronic Technology

基　　金：国家重点研发计划资助项目(2017YFC0703202);安徽省重点研发计划(1804a09020016)。

摘　　要：采用溶剂热法制备了不同形貌的In2O3纳米材料,利用X射线衍射仪(XRD)和扫描电子显微镜(SEM)对样品进行了表征和分析,并研究了冰醋酸的添加量对In2O3传感器气敏性能的影响。研究结果表明:通过调控冰醋酸的添加量不仅可以改变In2O3纳米材料的晶相及形貌,还可以优化In2O3传感器对乙醇的气体传感性能。添加浓度为0.45 mol/L的冰醋酸辅助合成的In2O3传感器气敏性能最好,在250℃的工作温度下对体积分数为5×10^-5乙醇的响应值高达141,并对体积分数低至5×10^-6的乙醇的灵敏度高至7.7。同时,该材料对乙醇表现出良好的重复性和稳定性,这对长期检测乙醇具有重要的应用价值。The In2 O3 nanomaterials with different morphologies were prepared by solvothermal method,the samples were characterized and analyzed with the X-ray diffraction diffractometer(XRD)and scanning electron microscopy(SEM),and the effect of the additive amount of glacial acetic acid on the gas sensing performances of the In2 O3 sensor was investigated.The research results show that adjusting the additive amount of glacial acetic acid can change the crystal phase and morphology of In2 O3 nanomaterials and optimize the gas sensing performance of the In2 O3 sensor to ethanol.The In2 O3 sensor prepared by glacial acetic acid with a concentration of0.45 mol/L shows the best gas sensing performance.At the operating temperature of 250℃,its response value to ethanol with a volume fraction of 5×10^-5 is as high as 141,and its sensitivity to ethanol with a volume fraction of 5×10^-6 is up to 7.7.Meanwhile,the material shows good repeatability and stability to ethanol,which reveals a significant application value in long-term detecting ethanol.

关 键 词：气体传感器 IN2O3 冰醋酸 溶剂热法 纳米材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]