基于微流控芯片的悬臂梁传感器性能优化  

Performance Optimization of Microcantilever Sensor Based on Microfluidic Chip

作　　者：张英杰 郝思萍 揣荣岩[1] 张贺[1] ZHANG Ying-jie;HAO Si-ping;CHUAI Rong-yan;ZHANG He(College of Information Science and Engineering,Shenyang University of Technology,Shenyang 110870,China;The 47th Research Institute of China Electronics Technology Group Corporation,Shenyang 110032,China)

机构地区：[1]沈阳工业大学信息科学与工程学院,辽宁沈阳110870 [2]中国电子科技集团公司第四十七研究所,辽宁沈阳110032

出　　处：《仪表技术与传感器》2020年第10期13-16,72,共5页Instrument Technique and Sensor

基　　金：辽宁省自然科学基金(20180550950)。

摘　　要：以微悬臂梁传感器为核心,设计集混合、富集和检测等功能于一体微流控芯片,可有效弥补微梁传感器在集成化、便携式检测应用方面的不足。然而,片上微尺度条件下的液相环境将影响检测结果的准确性。建立流固耦合模型,研究了流体速度、芯片结构对微梁传感器的影响,确定了微流控芯片的结构参数。结果表明,进样速度小于0.375 mL/min、80μm圆形微沟道、梯形检测池及传感器0°固定能有效降低流体流动特性的影响,并提升检测结果准确性。With the microcantilever sensor as the core,designing the integrated microfluidic chip with mixing,enrichment and detection functions can compensate for the microcantilever sensor shortcomings in integrated and portable detection applications.However,the microscale liquid phase environment affected the test results accuracy.The fluid structure interaction model was established,the influence of the fluid velocity and microfluidic chip structure were studied,and the microfluidic chipstructural parameters were determined.The results show that the injection speed less than 0.375 mL/min,80μm circular microchannel,trapezoidal detection pool and sensor 0° fixed can reduce the fluid flow characteristics influence and improve the detection results accuracy.

关 键 词：微悬臂梁 微流体流动 微流控芯片 弯曲位移 检测池 微沟道 

分 类 号：TB472[一般工业技术—工业设计]