双层结构的无线无源柔性压力传感器设计  

Design and Research of a Novel Double-Layer Structure of Wireless Passive Flexible Pressure Sensor

作　　者：娄文涛 杨林 于仕辉 董和磊 LOU Wentao;YANG Lin;YU Shihui;DONG Helei(School of Microelectronics,Tianjin University,Tianjin 300072,China;School of Instrument and Electronics,North University of China,Taiyuan Shanxi 030051,China)

机构地区：[1]天津大学微电子学院,天津300072 [2]中北大学仪器与电子学院,山西太原523808

出　　处：《传感技术学报》2020年第8期1079-1084,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(61701338);天津市自然科学基金项目(18JCQNJC01300)。

摘　　要：本文设计了一种双层结构的基于平面螺旋电感与叉指电容并联结构的LC谐振式无线无源柔性压力传感器。该传感器利用平面LC谐振回路的谐振频率随着外界应力的变化而改变的特性,采用电磁耦合的方式来实现对外部压力的无线测量。通过高频电磁仿真软件HFSS的建模与仿真,表明:该双层结构的传感器具有良好的压力测量特性,其有效测量距离达到了35 mm,高于单层结构的测量距离(25 mm),且可恢复性和重复性能良好,在电子皮肤和智能穿戴领域有着广阔的应用前景。A double-layer LC resonant wireless passive flexible pressure sensor consisted of a plane spiral inductor and an interdigital capacitor is designed.Based on the characteristic that the resonance frequency of the planar LC resonance circuit changes with the change of external strain,the wireless detection of external pressure was realized by electromagnetic coupling with two inductances.The simulation results of the HFSS show that the double-layer structure sensor has good measurement characteristics.Compared with the single-layer structure with a measurement distance of 25 mm,the effective measurement distance is increased to 35 mm.Furthermore,the sensor also exhibits good restorability and repeatability.There results indicate the double-layer LC resonant wireless passive flexible pressure sensor has a broad application prospect in the field of robot skin and intelligent wear.

关 键 词：无线无源传感器 压力测量 LC谐振回路 柔性 测量距离 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]