一种基于光刻打印技术的5G微波陶瓷介质滤波器的研制  

Development of 5G Microwave Ceramic Dielectric Filter Based on Digital Light Processing

作　　者：刘富海[1] 崔富义 韩磊挺 姚舜刚 方波 LIU Fuhai;CUI Fuyi;HAN Leiting;YAO Shungang;FANG Bo(Special Equipment College,Hangzhou Vocational&Technical College,Hangzhou,310018,CHN;Zhoushan City Special Equipment Inspecion Institute,Zhoushan,Zhejiang,316021,CHN;Zhejiang Academy of Special Equipment Science,Hangzhou,310018,CHN;College of Merology&Measurement Engineering.China Jiliang University,Hangzhou,310018,CHN)

机构地区：[1]杭州职业技术学院特种设备学院,杭州310018 [2]舟山市特种设备检测院,浙江舟山316021 [3]浙江省特种设备科学研究院,杭州310018 [4]中国计量大学计量测试工程学院,杭州310018

出　　处：《固体电子学研究与进展》2020年第5期356-360,388,共6页Research & Progress of SSE

基　　金：浙江省教育厅一般科研项目(Y201840508);国家重大科学仪器开发专项(2016YFF0100505)。

摘　　要：基于CST2019三维全波电磁场仿真软件和精确的陶瓷材料立体光刻成形技术,研制了一款可用于5G通信的0.9Al2O3-0.1TiO2微波介质陶瓷滤波器。该介质陶瓷中Al2O3和TiO2摩尔比为9∶1。实验结果表明,0.9Al2O3-0.1TiO2微波陶瓷在1 550℃烧结2 h,1 000℃后退火5 h,具有优异的介电性能,相对介电常数为12.3,品质因子和谐振频率乘积为111 800 GHz,温度系数为1.1×10-6/℃。滤波器的插入损耗和回波损耗的测试结果满足5G通信工程要求。A 0.9 Al2 O3-0.1 TiO2 microwave dielectric ceramic filter for 5 G communication was developed based on CST2019 three-dimensional full-wave electromagnetic field simulation software and accurate digital light processing(DLP).The molar ratio of Al2 O3 and TiO2 in the dielectric ceramic is9∶1.The experimental results show that 0.9 Al2 O3-0.1 TiO2 microwave ceramics have excellent dielectric properties when sintered at 1550℃for 2 hours and annealed at 1000℃for 5 hours,the relative permittivity is 12.3,the product of quality factor times resonant frequency is 111800 GHz,and the temperature coefficient is 1.1×10-6/℃.The measurement results of insertion loss and return loss of the filter meet the requirements of 5 G communication engineering.

关 键 词：微波介质陶瓷 滤波器 增材制造 数字光加工 5G通信 

分 类 号：TN713[电子电信—电路与系统]