注浆成形氧化铝陶瓷料浆的工艺控制  

Process Control of Alumina Ceramic Slurry by Slip Casting

作　　者：孟姗姗 王安英 徐东昌 李世慧 马建敏 Meng Shanshan;Wang An’ying;Xu Dongchang;Li Shihui;Ma Jian’min(Shandong Guiyuan Advanced Ceramics Co.,Ltd,Zibo,Shandong 255086)

机构地区：[1]山东硅元新型材料股份有限公司,山东淄博255086

出　　处：《山东陶瓷》2020年第5期11-13,共3页Shandong Ceramics

摘　　要：氧化铝陶瓷由于其具有较高的机械强度,硬度大,耐磨性好,化学稳定性优良等优点,在许多行业被广泛应用,近年来尤其在半导体行业中迅速发展,开展半导体设备用氧化铝精密陶瓷产品的开发意义重大。而注浆成形由于成本低,工艺过程简单,易于控制和操作等优点,成为氧化铝陶瓷生产中比较常用的一种成形方式。本文主要以95氧化铝陶瓷为例,从氧化铝粉体的选择、烧结助剂的选择、减水剂(分散剂)的选择、料浆的细度和颗粒分布、料浆的后续处理五个方面讨论了注浆成形氧化铝陶瓷料浆的工艺控制。Alumina ceramics are widely used in many industries because of their advantages of high mechanical strength,high hardness,good wear resistance and excellent chemical stability.Due to the advantages of low cost,simple process,easy control and operation,slip casting has become a common molding method in alumina ceramic production.In recent years,especially in the rapid development of semiconductor industry,it is of great significance to develop alumina precision ceramics for semiconductor equipment.Taking 95 alumina ceramics as an example,this paper discusses the process control of alumina slurry from five aspects:the choice of alumina powder,the choice of sintering assistant,the choice of water reducing agent(dispersant),the fineness and particle distribution of slurry,and the subsequent treatment of slurry.

关 键 词：氧化铝陶瓷 注浆成形 料浆 工艺控制 

分 类 号：TQ174.622[化学工程—陶瓷工业]