MOS场效应晶体管虚拟仿真实验教学资源建设  

Construction of virtual simulation experiment teaching resource for MOS field effect transistor

作　　者：李曼[1,2] 郭宇锋[1,2] 顾世浦[2] 姚佳飞 LI Man;GUO Yu-feng;GU Shi-pu;YAO Jia-fei(National Virtual Simulation Experiment Teaching Center for Information Electronic Technology,Nanjing University of Posts and Telecommunications,Nanjing 210023,China;State-Level Experimental Teaching Center for Electronic Science and Technology,Nanjing University of Posts and Telecommunications,Nanjing 210023,China)

机构地区：[1]南京邮电大学信息电子技术国家级虚拟仿真实验教学中心,江苏南京210023 [2]南京邮电大学电子科学与技术国家级实验教学中心,江苏南京210023

出　　处：《物理实验》2020年第11期35-40,共6页Physics Experimentation

基　　金：江苏省在线开放虚拟仿真实验教学项目(No.SYS2017SXF03);电子科学与技术国家级实验教学示范中心项目(虚拟201802,综合201806)。

摘　　要：为了解决大多数高校微电子专业实验教学面临的难题,建设了MOS场效应晶体管虚拟仿真实验教学资源.引入半导体器件的虚拟制造和虚拟测试理念,基于半导体工艺仿真软件和器件模拟软件进行二次开发,包含教学管理、虚拟制造和虚拟测试3大部分,共17个模块,实现了MOS场效应晶体管的各种制造工艺流程和直流、交流、瞬态等各种性能测试.虚拟仿真实验教学资源知识点覆盖面广,理念先进,辐射范围广,具有较好的学习效果,为微电子专业人才培养提供了优质的实验教学资源.In order to solve the problems faced by most college microelectronics professional experimental teaching,a virtual simulation experiment teaching resource for MOS field effect transistor was constructed.The virtual manufacturing and testing of semiconductor devices were introduced.Process simulation and device simulation software were redeveloped.It consisted of three parts:teaching management,virtual manufacturing and testing,with a total of 17 modules.Various manufacturing processes of MOS field effect transistors and various performance tests such as DC,AC,and transient were realized.The knowledge points covered a wide range,the concept was advanced,the radiation range was wide,and the learning effect was better,which could provide high quality experimental teaching resources for the training of microelectronics professionals.

关 键 词：MOS场效应晶体管 虚拟仿真 虚拟制造 虚拟测试 微电子 教学管理 

分 类 号：O4-39[理学—物理] G642.423[文化科学—高等教育学]