神经刺激/记录f MEA的高性能3D结构铂纳米镀层的研究  

High-Performance 3D Platinum Nanostructure Coating on fMEA for Neural Stimulation/Recording

作　　者：黄兆岭 曾齐[2] 李婉莹 黄金奖 秦水介[1] 吴天准[2] Huang Zhaoling;Zeng Qi;Li Wanying;Huang Jinjiang;Qin Shuijie;Wu Tianzhun(Department of Mechanical Engineering,Guizhou University,Guiyang 550025,China;Shenzhen Institute of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518000,China)

机构地区：[1]贵州大学机械工程学院,贵州贵阳550025 [2]中国科学院深圳先进技术研究院,广东深圳518000

出　　处：《稀有金属材料与工程》2020年第10期3536-3543,共8页Rare Metal Materials and Engineering

基　　金：国家重点研究开发项目(2016YFC010324);国家自然科学基金(61741505);深圳科技研究计划(JCYJ201708)。

摘　　要：为确保柔性神经电极长期植入的安全和有效刺激/记录,针对柔性微电极阵列(fMEA)特定的植入环境,其设计和制造工艺应满足生物相容性、高分辨率、柔性和低阻抗等要求。本研究使用柔性聚酰亚胺(PI)基体提出了一种f MEA加工方法,并探索了多种三维(3D)结构铂金属涂层的体外性能表现。与未修饰的裸铂金属电极表面相比,3D微结构涂层在1 kHz频率下的阻抗最大下降了94.77%,达到了0.824 kΩ,突破了1 kΩ的极限。而新颖的垒晶状结构涂层电极相比于其他结构电极的阴极电荷存储容量(CSCc)最大可提高6.67倍,达到13.47 mC·cm^-2。安全电荷注入能力(CIC)与Pt gray修饰电极相比提高19.6倍,达到了2.53 mC·cm^-2。因此,这种fMEA的微纳加工方法将极大地提高神经刺激/记录的分辨率和精准度,为生物医学植入器件的应用提供广阔的应用前景。Flexible microelectrode array(f MEA)is one of the key devices for neural stimulation and recording.For its specific implantation environment,its design and manufacture should meet the requirements of biocompatibility,high resolution,flexibility and low impedance to ensure safe and long-term effective stimulation.In this paper,an fMEA fabrication process was proposed by using flexible polyimide matrix with a variety of 3D platinum nanostructure coatings fabricated by electrochemical plating at 200μm stimulation site.Compared with the surface of bare platinum coating,the impedance of 3D micro-structure coating decreases by 94.77%at 1 kHz,reaching 0.824 kΩand breaking through the limit of 1 kΩ.Compared with other coated electrodes,the charge storage capacity(CSCc)of the novel barrier crystal morphology coated electrodes can increase by 6.67 times to 13.47 mC·cm^-2.The safe charge injection ability is 19.6 times higher than that of Pt-gray,reaching 2.53 mC·cm^-2.Therefore,this electroplating coating structure and process is promising for effective nerve stimulation/recording in various applications,and have broad application prospects in biomedical fields.

关 键 词：柔性微电极阵列 3D纳米涂层 神经刺激/记录 阻抗特性 垒晶状形貌 

分 类 号：TM53[电气工程—电器]